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Detection system for electronic-grade tetramethylammonium hydroxide

A tetramethylammonium hydroxide and detection system technology, applied in the field of chemical analysis, can solve the problems of cumbersome methods and complicated operations, and achieve the effects of good chemical stability, simplified liquid inlet operation, and improved efficiency

Pending Publication Date: 2020-05-19
LANGFANG INST OF PROCESS ENG CAS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Among the technical indicators stipulated in GB / T-37403-2019, the chromaticity, TMAH concentration, CO 3 - Concentration, Cl - Concentration, methanol concentration, number of particles, and the concentration of lithium, boron, sodium, magnesium, aluminum, potassium and other ions are strictly regulated. Among them, there are many detection items for electronic grade tetramethylammonium hydroxide, which causes the electronic grade The detection method of tetramethylammonium hydroxide is relatively cumbersome and complicated to operate

Method used

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  • Detection system for electronic-grade tetramethylammonium hydroxide
  • Detection system for electronic-grade tetramethylammonium hydroxide
  • Detection system for electronic-grade tetramethylammonium hydroxide

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Embodiment 1

[0057] This embodiment provides a detection system for electronic grade tetramethylammonium hydroxide, the structure diagram of the detection system is as follows figure 1 As shown, the schematic diagram of the structure is shown in figure 2 As shown, it includes a sampling unit, a detection unit, a dilution device 2 and a control unit.

[0058] The detection unit includes a chromaticity detection device 31, TMAH and CO 3 - Concentration detection device 32, Cl - A concentration detection device 33 , a methanol concentration detection device 34 , an impurity ion concentration detection device 35 , and a particle number detection device 36 . The chromaticity detection device 31 is a fully automatic platinum-cobalt chromaticity analyzer with automatic sampling function; the TMAH and CO 3 - Concentration detection device 32 is the automatic potentiometric titrator with automatic sampling function; The Cl - The concentration detection device 33 is an ion chromatograph with ...

Embodiment 2

[0071] This embodiment provides a detection system for electronic-grade tetramethylammonium hydroxide. Compared with Embodiment 1, the detection system for electronic-grade tetramethylammonium hydroxide provided by this embodiment also includes a displacement device.

[0072] Said device is a mechanical arm, and at least one mechanical arm is independently configured in the sample outlet pipeline between the dilution device 2 and each detection device, so as to facilitate accurate delivery of the sample to be tested.

[0073] In summary, the detection system of the electronic grade tetramethylammonium hydroxide provided by the present invention has a simple structure, and can quickly detect chromaticity, TMAH and CO in the electronic grade tetramethylammonium hydroxide product. 3 - Concentration, Cl- concentration, methanol concentration, impurity ion concentration and particle number are detected, and the operation is simple and the detection is fast, which can improve the de...

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Abstract

The invention provides a detection system of electronic-grade tetramethylammonium hydroxide. The detection system of the electronic-grade tetramethylammonium hydroxide comprises a sample injection unit, a detection unit and a control unit, the detection unit is connected with the sample injection unit and is used for detecting the chromaticity, the TMAH and CO3 <-> concentration, the Cl <-> concentration, the methanol concentration, the impurity ion concentration and the particle number of the sample under the control of the control unit; the detection system of the electronic-grade tetramethylammonium hydroxide is simple to operate, can quickly determine various parameters in an electronic-grade tetramethylammonium hydroxide product, and improves the detection efficiency of the electronic-grade tetramethylammonium hydroxide product.

Description

technical field [0001] The invention belongs to the technical field of chemical analysis, and relates to a detection system for tetramethylammonium hydroxide, in particular to a detection system for electronic grade tetramethylammonium hydroxide. Background technique [0002] Tetramethylammonium hydroxide (TMAH), the molecular formula is (CH 3 ) 4 NOH, with a molecular weight of 91.15, is a strong base with the same strength as caustic. Because of its strong alkalinity and no residue after thermal decomposition, especially no conductive ionic substances, TMAH is widely used in the electronics industry, for example, as a cleaning agent in the production of silicon wafers And photolithography developer for integrated circuits, liquid crystal panels, printed circuit boards, etc. With the continuous development of large-scale integrated circuits, the demand for electronic-grade TMAH is increasing day by day, and at the same time, there are higher requirements for the quality ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N35/10G01N21/25G01N31/16G01N30/96G01N30/02G01N27/62G01N15/14G01N1/38G01N27/626
CPCG01N35/1065G01N35/0099G01N21/251G01N31/164G01N30/96G01N30/02G01N27/62G01N15/14G01N1/38G01N2001/386G01N2015/1486
Inventor 白芳华超
Owner LANGFANG INST OF PROCESS ENG CAS
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