Defect reinspection system and method
A defect detection and defect technology, applied in optical testing defect/defect, program control in sequence/logic controller, electrical program control, etc., can solve problems such as affecting efficiency, affecting customer shipments, and misjudging non-real defects , to achieve the effect of improving the efficiency of re-inspection
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0029] Such as figure 1 As shown, it is a defect re-inspection system provided by the embodiment of the present invention, including AOI detection line body control module LCS1, re-inspection line body control module LCS2, AOI detection module and re-inspection module; AOI detection line body control module LCS1 is used It is used to control the AOI detection module and receive the AOI detectio...
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