Defect reinspection system and method

Abstract

The invention discloses a defect reinspection system and method. The defect reinspection system comprises an AOI detection line body control module LCS1, a reinspection line body control module LCS2,an AOI detection module and a reinspection module. The AOI detection line body control module LCS1 is used for controlling the AOI detection module and receiving an AOI detection result; the reinspection line body control module LCS2 is used for controlling the reinspection module and sending a trigger instruction to the reinspection module; the AOI detection module is used for carrying out defectdetection on the panel and uploading a defect detection result to the line body control module LCS1; the reinspection module is used for obtaining a defect detection result from the AOI detection line body control module LCS1 and carrying out reinspection on the defect detection result. According to the reinspection system, the reinspection module can directly and automatically obtain the AOI detection result, and the working efficiency of reinspection is improved.

Description

technical field [0001] The invention belongs to the field of panel inspection, and more specifically relates to a panel defect re-inspection system and method. Background technique [0002] In the process of AOI defect detection, due to a series of reasons such as optics, mechanism, algorithm, camera, etc., the automatic detection results of the panel may cause non-real defects to be misjudged as real defects, which is called over-inspection. As a result, the grade judgment of the panel is inaccurate, which affects customer shipments. [0003] In order to be able to accurately classify the panels, it is necessary to carry out sampling re-inspection on the panels judged to be NG by the AOI inspection system. Manually point the screen to check whether there are real defects in the defect positions output by the AOI automatic detection. Due to the AOI inspection station and manual The re-inspection stations are physically separated, and the re-inspectors need to go to another ...

AI Technical Summary

Problems solved by technology

[0002] In the process of AOI defect detection, due to a series of reasons such as optics, mechanism, algorithm, camera, etc., the automatic detection results of the panel may cause non-real defects to be misjudged as real defects, which is called over-inspection. Inaccurate determination of panel grades, affecting customer shipments

[0003] In order to be able to accurately classify the panels, it is necessary to carry out sa

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