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Piezoelectric element

A technology of piezoelectric elements and piezoelectric layers, applied to electrical elements, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve problems such as damage or deterioration, and achieve the effect of improving connection reliability

Active Publication Date: 2020-06-09
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned side electrodes are generally provided on the side of the body by sintering, sputtering, evaporation, etc., and such side electrodes are easily damaged or deteriorated by external factors because they are exposed to the outside.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0085] First, refer to figure 1 as well as figure 2 The structure of the piezoelectric element 10 according to the first embodiment will be described below.

[0086] Such as figure 1 As shown, the piezoelectric element 10 includes a laminated body 20 having a rectangular parallelepiped shape extending in one direction. As an example, the size of the laminated body 20 is 2.0 mm in the long side direction; 0.5 mm in the short side direction; and 0.15 mm in thickness. Such as figure 2 As shown, the laminated body 20 includes a multilayer electrode layer 30 and multilayer piezoelectric body layers 36 and 38, and is constituted by alternately laminating the electrode layer 30 and the piezoelectric body layers 36 and 38. In this embodiment, the laminated body 20 includes three or more electrode layers 30 and two or more piezoelectric layers 36 and 38. in figure 1 with figure 2 Here, the laminated body 20 includes seven layers of the electrode layer 30 and the piezoelectric layer 36...

no. 2 Embodiment approach

[0125] Next, refer to Figure 7 ~ Figure 10 The structure of the piezoelectric element 100 according to the second embodiment will be described below.

[0126] Such as Figure 7 As shown, the piezoelectric element 100 is formed by alternately stacking a multilayer piezoelectric body layer 103 formed with a single electrode 102 and a multilayer piezoelectric body layer 105 formed with a common electrode 104, and further formed by forming terminal electrodes 117, 118. The piezoelectric body layer 107 is laminated on the uppermost layer.

[0127] The piezoelectric element 100 includes a laminated body 101 having a rectangular parallelepiped outer shape extending in one direction. As an example, the dimensions of the laminated body 101 are: the length in the long side direction is 30.0 mm; the length in the short side direction is 15.0 mm; and the thickness is 0.30 mm.

[0128] The piezoelectric body layers 103, 105, and 107 are all rectangular flat plates. As an example, the length in ...

no. 3 Embodiment approach

[0159] Next, refer to Figure 13 as well as Figure 14 The structure of the piezoelectric element 210 according to the third embodiment will be described below.

[0160] Such as Figure 13 As shown, the piezoelectric element 210 includes a laminated body 220 having a rectangular parallelepiped shape extending in one direction. As an example, the dimensions of the laminate 220 are as follows: the length in the long side direction is 2.0 mm; the length in the short side direction is 0.5 mm; and the thickness is 0.15 mm. Stack 220 such as Figure 14 The illustration includes a multilayer electrode layer 230 and multilayer piezoelectric body layers 236, 238, and is constituted by alternately stacking the electrode layer 230 and the piezoelectric body layers 236, 238. In the present embodiment, the laminated body 220 includes three or more electrode layers 230 and two or more piezoelectric layers 236 and 238. in Figure 13 with Figure 14 In this case, the laminated body 220 includes...

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Abstract

In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, orthe like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since aprotrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformationof the through hole conductor is prevented or obstructed.

Description

[0001] (This application is a divisional application for a patent application whose application date is July 06, 2017, the application number is 201710547890.1, and the invention name is "piezoelectric element".) Technical field [0002] The present invention relates to piezoelectric elements. Background technique [0003] Hitherto, a thin laminated piezoelectric element has been known as a piezoelectric element. In such a piezoelectric element, electrical conduction is achieved between electrode layers such as surface electrodes and internal electrodes through side electrodes or through-hole conductors provided through the piezoelectric body layers. [0004] The above-mentioned side electrodes are generally provided on the side surfaces of the element body by sintering, sputtering, vapor deposition, or the like. Since such side electrodes are exposed to the outside, they are likely to be damaged or deteriorated by external factors. In addition, since the above-mentioned through-ho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/083H01L41/047H01L41/04H10N30/50H10N30/80H10N30/87
CPCH10N30/80H10N30/874H10N30/50H10N30/871H10N30/872H10N30/508
Inventor 太田佳生佐佐木诚志太田义明毛塚贵大稻叶胜也佐藤琳立本一志井上正良小松雄三
Owner TDK CORPARATION