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Micro lens detection system and its detection method
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A detection system and micro lens technology, applied in the field of optical detection, can solve the problems of small size of micro lens and difficult detection, and achieve the effect of real and reliable detection results.
Active Publication Date: 2021-03-30
FUDAN UNIV +1
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[0006] The purpose of the present invention is to overcome the defects of the prior art, provide a micro-lens detection system and its detection method, solve the problem of difficult detection caused by the small size of the micro-lens, by measuring the phase modulation ability of the sample to the incident light, with Evaluate the imaging quality and quality of the sample, making the test results more authentic and reliable
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[0087] The sample is placed between the third objective lens 18 and the first objective lens 12, and the monochromatic light source 41 is turned on, and the monochromatic light source 41 is divided into a first light beam and a second light beam through a first beam splitter 42;
[0088] The first light beam passes through the third lens 17, the third objective lens 18, the sample 51, the first objective lens 12, the first lens 13 and the second beam splitter 14 successively after being reflected by the first reflector 11, and the first light beam passes through the second beam splitter The beam device 14 is divided into two beams, one beam is turned and imaged at the second detector 32 after passing through the fourth lens 31 to form a converging point, and the other beam does not turn and continues to propagate to the first detector 15;
[0089] The second light beam enters the second beam splitter 14 after being reflected by the second objective lens 21, the second lens 22 a...
Embodiment 1
[0106] Embodiment one, combining image 3 Shown:
[0107]
[0108]
[0109] The grating diffraction direction is written by the classical diffraction equation as:
[0110] dsinθ=mλ
[0111] Where d is the period of the grating, θ is the direction of diffraction, λ is the wavelength of light, and m is the order of diffraction. The direction of diffraction is determined by the period of the grating. If you want to explore the essence of grating diffraction, the essence is the regulation of the phase by the grating. The direction of propagation is determined by the gradient of the phase, as image 3 As shown, the phase distribution of the first-order blazed grating in the experiment, where the phase gradient direction is the first-order direction with the strongest diffraction.
Embodiment 2
[0112] Embodiment two, combining Figure 4 Shown:
[0113]
[0114]
[0115] The microlens array is an array in which each unit is a small lens arranged periodically, and each lens has a focusing ability, so the phase distribution of a unit of the microlens array is measured, such as Figure 4 As shown, it can be seen from the figure that the phase distribution of the microlens is in line with the theoretical comparison. The phase change in the edge area of the lens is not as large as ideal due to lens processing. The quality of the lens can be preliminarily seen through the phase distribution. If the lens has If there are obvious defects or scratches, the phase discontinuity can be clearly seen.
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Abstract
The invention relates to a micro lens detection system and a detection method thereof. The system comprises a monochromatic light source, a first beam splitter, a first reflector, a first objective lens, a first lens, a second beam splitter, a first real image surface, a first detector, a second objective lens, a second lens and a second reflector, wherein the first beam splitter splits a light beam of the monochromatic light source into a first light beam and a second light beam; the first reflector, the first objective lens, the first lens, the second beam splitter, the first real image surface and the first detector are sequentially arranged corresponding to the first light beam; the second objective lens, the second lens and the second reflector are sequentially arranged along asecond light beam, and the second light beam is reflected into a second beam splitter through the second reflector to be combined with the first light beam into one beam; and a sample is placed between the first reflector and the first objective lens so that the first light beam interferes with the second light beam after passing through the sample, and the first detector acquires interference fringes of the first light beam and the second light beam. In the invention, a problem of difficult detection caused by a small size of a micro lens is effectively solved, and imaging quality and qualityof the sample are evaluated by measuring a phase modulation capability of the sample to incident light so that a detection result is more real and reliable.
Description
technical field [0001] The invention relates to the field of optical detection, in particular to a micro lens detection system and a detection method thereof. Background technique [0002] With the advent of the era of integration, people's demand for lenses is increasing, and the size of lenses is getting smaller and smaller. People have developed three types of microlenses: traditional microlenses focused by refractive index, with a diameter of about 150 μm ; Fresnel micro-lenses made on the principle of Fresnel zone plate diffraction can be as small as tens of microns in diameter; and metalens (metalens) that can be focused by adjusting the phase through micro- and nano-microstructures can be as small as 10 μm in diameter , due to the small size of the lens, the traditional method of detecting the lens has been unable to apply. [0003] The essence of a lens is to regulate the light wave front, that is, to change the phase distribution. Therefore, the optical performance...
Claims
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Application Information
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