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Alignment structure

A technology for aligning parts and extending parts, which is applied in the direction of semiconductor/solid-state device parts, semiconductor devices, electrical components, etc., and can solve the problem of uneven coating of photoresist

Active Publication Date: 2020-07-31
PLAYNITRIDE DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention is aimed at an alignment structure, using extensions to avoid the problem of uneven coating of photoresist

Method used

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no. 1 example

[0023] According to the first embodiment of the present invention, the alignment structure 200 includes a substrate 201 , an alignment portion 202 and an extension portion 203 . The alignment portion 202 is disposed on the substrate 201 , and the extension portion 203 is disposed on the substrate 201 . The extension portion 203 at least partially surrounds the alignment portion 202 and is separated from the alignment portion 202 by a gap 204 . The side of the extension part 203 close to the alignment part 202 and the side of the alignment part 202 close to the extension part 203 are conformal to each other (conformal), that is, as Figure 1A As shown, the side of the alignment part 202 close to the extension part 203 is in the shape of a cross, and the side of the extension part 203 close to the alignment part 202 is also in the shape of a cross.

[0024] refer to Figure 1B , it can be seen that the photoresist 205 does not have a thin photoresist coating above the gap 204 be...

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Abstract

The invention provides an alignment structure. The alignment structure comprises a substrate, an alignment part and an extension part. The alignment part is arranged on the substrate; the extension part is arranged on the substrate; at least part of the extension part surrounds the alignment part; and a gap is formed between the extension part and the alignment part. The side, close to the alignment part, of the extension part and the side, close to the extension part, of the alignment part are conformal.

Description

technical field [0001] The present invention relates to an alignment structure. Background technique [0002] The alignment structure (Alignment structure or Alignment key) plays an important role in the manufacturing process, such as photolithography (photolithography) alignment. Generally, the alignment structure is made by direct metal plating or etching a pattern, but After some processes, the metal or pattern will not be visible, or the photoresist coating around the alignment structure will be thinner and uneven due to the height difference between the alignment structure and its surrounding structures. Chromatic aberration makes the identification of the alignment structure misaligned, which in turn causes the problem of poor yield. Contents of the invention [0003] The present invention is aimed at an alignment structure, which uses extensions to avoid the problem of uneven coating of photoresist. [0004] According to an embodiment of the present invention, an ...

Claims

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Application Information

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IPC IPC(8): H01L23/544
CPCH01L23/544H01L2223/54426
Inventor 陈彦烨杨翔甯吴志凌彭钰雅
Owner PLAYNITRIDE DISPLAY CO LTD
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