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Structure and formation method thereof

A packaging structure and packaging module technology, applied in semiconductor/solid-state device components, semiconductor devices, electrical components, etc.

Pending Publication Date: 2020-10-09
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These relatively new semiconductor die packaging technologies currently face many manufacturing challenges

Method used

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  • Structure and formation method thereof
  • Structure and formation method thereof
  • Structure and formation method thereof

Examples

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Embodiment Construction

[0043] The following disclosure provides many different embodiments, or examples, for implementing different features of the disclosure. Examples of specific components and their arrangements are described below to illustrate the present disclosure. Of course, these embodiments are only examples, which should not limit the scope of the present disclosure. For example, it is described in the specification that a first feature is formed on or over a second feature, which may include an embodiment in which the first feature is in direct contact with the second feature, and may also include an embodiment in which additional features are formed on the first feature. An embodiment between a feature and a second feature such that the first feature and the second feature may not be in direct contact. In addition, repeated reference symbols and / or symbols may be used in different examples of the present disclosure. This repetition is for the purpose of simplicity and clarity, and is n...

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PUM

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Abstract

A package structure and a formation method thereof are provided. The method includes forming a redistribution structure over a carrier substrate and disposing a semiconductor die over the redistribution structure. The method also includes stacking an interposer substrate over the redistribution structure. The interposer substrate extends across edges of the semiconductor die. The method further includes disposing one or more device elements over the interposer substrate. In addition, the method includes forming a protective layer to surround the semiconductor die.

Description

technical field [0001] Some embodiments of the present disclosure relate to semiconductor die packaging technology, in particular to a semiconductor die packaging structure and a method for forming the same. Background technique [0002] The semiconductor integrated circuit (IC) industry has experienced rapid growth. Due to the continuous advancement of semiconductor manufacturing process technology, semiconductor devices with finer features and / or higher integration are produced. Functional density (ie, the number of interconnected elements per chip area) has generally increased, while feature size (ie, the smallest feature that can be produced using a fabrication process) has shrunk. This size reduction process generally provides benefits through increased production efficiency and reduced manufacturing costs. [0003] Chip packages not only provide protection for semiconductor devices from environmental pollution, but also provide connection interfaces for semiconductor...

Claims

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Application Information

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IPC IPC(8): H01L21/56H01L21/60H01L23/485H01L23/488H01L23/31H01L25/18
CPCH01L25/18H01L23/3128H01L21/56H01L24/02H01L24/03H01L24/11H01L24/13H01L2224/02381H01L2224/02373H01L2224/02331H01L2224/031H01L2224/111H01L2224/13008H01L21/6835H01L2221/68359H01L2221/68345H01L2221/68368H01L2924/19105H01L2224/73204H01L2224/32225H01L23/5389H01L23/50H01L23/49816H01L2224/81005H01L2225/06517H01L2225/06572H01L25/0652H01L25/0657H01L25/16H01L2924/1533H01L2224/73267H01L2224/92244H01L2224/04105H01L2224/83005H01L2924/15311H01L2224/12105H01L2224/92125H01L24/20H01L24/32H01L24/16H01L2224/16227H01L2224/2919H01L2224/81192H01L2224/81193H01L2224/17136H01L24/29H01L24/81H01L24/83H01L24/19H01L2224/18H01L2224/13116H01L2224/13124H01L2224/13139H01L2224/29099H01L2224/13111H01L2224/13147H01L2224/13144H01L2224/131H01L2224/16225H01L2924/00H01L2924/00014H01L2924/0001H01L2924/014H01L2924/0105H01L2924/01079H01L2924/01013H01L2924/01082H01L2924/01029H01L2924/01047H01L21/4857H01L25/50H01L21/568
Inventor 蔡柏豪林孟良庄博尧翁得期郑心圃
Owner TAIWAN SEMICON MFG CO LTD
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