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The Detection Method of Dynamic Error of Grating Ruler

A technology of dynamic error and detection method, applied in measurement devices, optical devices, instruments, etc., can solve the problems of lack of systematic research and incomplete consideration of dynamic error influencing factors.

Active Publication Date: 2021-12-14
广东省计量科学研究院(华南国家计量测试中心)
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Problems solved by technology

[0003] Based on research at home and abroad, it is found that the current detection of grating ruler error is mainly static error detection, and some researches involving dynamic error of grating are only dynamic error measurement under specific working conditions, or the factors affecting dynamic error are not considered comprehensively and lack systematic research, such as the lack of dynamic accuracy detection of large-range, high-precision grating rulers

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  • The Detection Method of Dynamic Error of Grating Ruler
  • The Detection Method of Dynamic Error of Grating Ruler

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Embodiment Construction

[0035] The present invention will be described in further detail below in conjunction with accompanying drawing

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0037] Such as figure 1 As shown, the embodiment of the present invention provides a dynamic error detection system for a grating ruler, comprising: a grating ruler 15 and a grating ruler reading head 4 cooperating with the grating ru...

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Abstract

The invention discloses a grating ruler dynamic error detection system, which comprises a first device for obtaining the real-time position of the grating ruler to be measured; a second device for determining the reference position of the grating ruler to be measured; a signal acquisition controller for converting the first The position signals obtained by the device and the second device are sent to the computer; the computer compares the received position signals to determine the dynamic error of the grating ruler. The detection system uses laser interference as the length reference, realizes the simulation of different operating conditions of the grating ruler through the servo linear motor, and designs a dual-channel signal acquisition and processing system based on FPGA to realize the synchronous acquisition of reference signals and real-time signals. Through data storage and Subsequent transmission processing, analysis and display of measurement results.

Description

technical field [0001] The invention relates to the technical field of grating ruler performance detection, and more specifically, to a method for detecting the dynamic error of the grating ruler. Background technique [0002] The grating ruler is an important position feedback component, which is widely used in modern machining industries such as CNC machine tools. High-performance grating rulers, especially large-travel high-precision absolute grating rulers, are one of the technical bottlenecks of my country's high-end fully closed-loop CNC machine tools, and currently almost all rely on imports. At present, there have been some domestic researches on the static and dynamic characteristics of grating rulers and dynamic detection. Zheng Liming of Changchun Institute of Optics and Mechanics studied static accuracy detection and correction methods. This scheme mainly considered the impact of static geometric errors on accuracy, and did not conduct dynamic error analysis. C...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/002
Inventor 徐全坤黄振宇阚侃张向谭翠媚罗旭东
Owner 广东省计量科学研究院(华南国家计量测试中心)
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