Large-numerical-aperture laser lens imaging inspection system

A numerical aperture and laser lens technology, applied in the field of optical inspection, can solve problems such as irregular shape, chromatic aberration interference, and uncertain quantity

Pending Publication Date: 2020-10-30
卡门哈斯激光科技(苏州)有限公司
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims at the problems of uncertain small hole size, irregular shape, uncertain quantity, and chromatic aberration interference in the inspection of the existing star point plate, and proposes a large numeri

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Large-numerical-aperture laser lens imaging inspection system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] Below by embodiment and in conjunction with accompanying drawing, the present invention will be further described:

[0015] Such as figure 1 As shown, a large numerical aperture laser lens imaging inspection system is mainly composed of a laser lens to be tested 1, a single-mode monochromatic light source 2, an optical fiber collimator 3, a standard objective lens 4, a standard tube lens 5, and an area array CCD element 6 .

[0016] Single-mode monochromatic light source 2, fiber optic collimator 3, standard objective lens 4, standard tube lens 5 and area array CCD element 6 are set at intervals in sequence, the laser lens to be tested 1, single-mode monochromatic light source 2, fiber optic collimator 3, Standard objective lens 4, standard tube lens 5, and area array CCD element 6 are located on the same optical axis.

[0017] The single-mode monochromatic light source 2 and the fiber collimator 3 constitute a parallel light system. After the single-mode monochromat...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Core diameteraaaaaaaaaa
Effective focal lengthaaaaaaaaaa
Login to view more

Abstract

The invention discloses a large-numerical-aperture laser lens imaging inspection system. A single-mode monochromatic light source and an optical fiber collimating mirror form a parallel light system,a to-be-measured laser lens is slidably installed between the optical fiber collimating mirror and a standard objective lens along the optical axis and is used for focusing incident parallel light beams into a focus light spot, and the position of the focus light spot coincides with the focus of the standard objective lens. The standard objective lens and a standard tube lens form a conjugate imaging system, and the conjugate imaging system is used for amplifying the focus light spot into a focused light beam image and projecting the focused light beam image to an area array CCD element, the position of the area array CCD element coincides with the focus of the standard tube lens, the amplification factor of the conjugate imaging system is 10X-100X, and the numerical aperture NA of the to-be-measured laser lens is smaller than or equal to the numerical aperture NA of the standard objective lens. The system has the advantages of being flexible in operation, high in visibility and easy in judgment and standardization, the quality and efficiency of laser optical lens design and optical inspection are improved, and higher production efficiency and more normative inspection quality control are achieved for laser lens production.

Description

technical field [0001] The invention belongs to the technical field of optical inspection, in particular to an imaging inspection system of a laser lens with a large numerical aperture. Background technique [0002] In modern industrial production, the use of laser as a processing method for cutting, welding and marking of various materials has been very extensive. As the ablation width and material loss are required to be reduced in the laser cutting process, it is necessary to use a laser lens with a larger numerical aperture and a smaller focus spot to improve processing efficiency and reduce material waste. The laser lens with larger numerical aperture and smaller focus spot requires higher production and assembly precision. [0003] The inspection of high-precision lenses generally adopts the star point method, that is, by observing the shape and light intensity distribution of a diffraction image (commonly called a star point image) formed by a point light source pass...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0207
Inventor 周志凯刘良清徐海锋
Owner 卡门哈斯激光科技(苏州)有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap