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Temperature sensing apparatus and temperature sensing system using the same

A technology of temperature sense and temperature sensor, which is applied in the direction of temperature measurement of moving fluids, measuring devices, parts of thermometers, etc., and can solve the problems of low thermal conductivity of PFA pipes

Pending Publication Date: 2021-01-19
SK HYNIX INC +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the low thermal conductivity of PFA tubing, the temperature of PFA tubing may vary greatly from the actual temperature of the fluid

Method used

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  • Temperature sensing apparatus and temperature sensing system using the same
  • Temperature sensing apparatus and temperature sensing system using the same
  • Temperature sensing apparatus and temperature sensing system using the same

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Embodiment Construction

[0017] Various embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The drawings are schematic illustrations of various embodiments (and intermediate structures). As such, variations in the configuration and shape of the illustrations as a result, for example, of manufacturing techniques and / or tolerances are to be expected. Accordingly, the described embodiments should not be construed as limited to the specific configurations and shapes shown herein, but may be included in configurations and shapes without departing from the spirit and scope of the present invention as defined in the appended claims deviation on the

[0018] The invention is described herein with reference to cross-section and / or plan illustrations of idealized embodiments of the invention. However, the embodiments of the present invention should not be construed as limiting the inventive concept. While a few embodiments of the present inventio...

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Abstract

The invention discloses a temperature sensing apparatus and a temperature sensing system using the same. The temperature sensing apparatus may include a body, a tube combined with the body, and a temperature sensor. The temperature sensor is configured to measure a temperature of an object, in the tube, without being in contact with the object. The body may include an air chamber formed adjacent to a temperature sensing region of the object.

Description

[0001] Cross References to Related Applications [0002] This application claims priority from Korean Patent Application No. 10-2019-0085692 filed with the Korean Intellectual Property Office on July 16, 2019, the entire contents of which are hereby incorporated by reference. technical field [0003] Various embodiments generally relate to clip-type non-contact temperature sensing devices and temperature sensing systems using the same. Background technique [0004] Semiconductor devices can be manufactured using various kinds of manufacturing apparatus. The manufacturing facility may include a cleaning device. In order for the cleaning apparatus to etch wafers at an optimal rate while having increased cleaning capabilities, fluids such as various types of chemicals and ultrapure water flowing through perfluoroalkoxy resin (PFA) tubing are monitored and controlled in real time ) temperature is very important. [0005] According to the related art, the temperature of the fl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/02G01J5/10
CPCG01J5/02G01J5/10G01K13/02G01K1/143G01K1/14G01K7/42G01J5/04G01J5/0037G01J5/0003G01J5/0255G01J5/025G01J5/046G01J5/048G01J5/045G01J5/0806H01L21/67248H01L21/67098H01L21/67017H01L21/67253H01L21/67276G01K1/20G01K1/02G01J5/80G01J5/06G01K7/16G01J5/064
Inventor 李泰昊李珖文黄斗铁
Owner SK HYNIX INC
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