Chip and its preparation method, electronic equipment
A technology for electronic equipment and chips, applied in circuits, electrical components, electrical solid devices, etc., to solve problems such as failure of bare chips and cracks in bare chips.
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example 1
[0098] Such as Figure 3a As shown, the chip 20 includes a semiconductor substrate 21 and a circuit layer 250 with a circuit structure on the semiconductor substrate 21 ;
[0099] The circuit layer 250 includes a multi-layer first dielectric layer 212 and a multi-layer metal pattern layer 25 , and the metal pattern layer 25 constitutes the circuit structure of the chip 20 . There is a first dielectric layer 212 between two adjacent metal pattern layers 25 , and the first dielectric layer 212 is used to separate the metal pattern layers 25 located in different layers in the circuit layer 250 . The metal pattern layers 25 of different layers may be electrically connected through via holes on the first dielectric layer 212 .
[0100] In this case, it can be seen from the above that in order to achieve the above-mentioned function of blocking crack propagation at the interface between adjacent first dielectric layers 212, the chip 20 further includes a plurality of first The rei...
example 2
[0117] In this example, the chip 20 is a chip with an image sensing function, which is the same as Example 1 in that it includes the above circuit layer 250 with a circuit structure, and the difference is that it also includes a photosensitive device.
[0118] Such as Figure 8a As shown, the chip 20 includes a semiconductor substrate 21, a circuit layer 250 as described in Example 1 provided on the semiconductor substrate 21, a plurality of photosensitive devices 26 provided on the side of the circuit layer 250 away from the semiconductor substrate 21, and a plurality of photosensitive devices 26 provided on the side of the circuit layer 250 away from the semiconductor substrate 21. The second dielectric layer 222 on the side away from the semiconductor substrate 21 and the plurality of first stiffeners 24 .
[0119] In this case, the chip 20 includes a multi-layer dielectric layer including a second dielectric layer 222 and a multi-layer first dielectric layer 212 . The sec...
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