Low-temperature gas humidity measuring system and method

Abstract

The invention provides a low-temperature gas humidity measuring system and method, and the method comprises the step of converting gas humidity measurement into dew point temperature measurement through employing the principle of a cold mirror dew point method; a dew point generation device comprises a low-temperature temperature control platform and a cold mirror and is arranged on an objective table of the low-temperature temperature control platform; the dew point generation detection system comprises a laser emitter and a photoelectric detector, and the laser emitter and the photoelectricdetector are externally connected to the outside of a vacuum cover of the low-temperature temperature control platform through optical through holes. Light emitted by the laser emitter enters the coldmirror through the optical through hole, is reflected and then enters the photoelectric detector provided with the optical filter, and dew point generation is judged through obvious change of signalsof the photoelectric detector. According to the invention, while the low-temperature temperature control platform is cooled to an extremely low temperature, the laser emitter and the photoelectric detector still work in a normal-temperature state, and at the moment, the dew point formation temperature on the cold mirror is accurately measured, so that relatively accurate gas humidity can be deduced.

Description

technical field [0001] The invention relates to the field of low temperature measurement, in particular to a system and method for measuring gas humidity at low temperature by using a chilled mirror dew point method. Background technique [0002] With the continuous development of technologies such as superconductivity and nuclear fusion in the low temperature field, the requirements for the accuracy and stability of temperature control are gradually increasing, and the performance requirements for deep low temperature temperature sensors in the deep low temperature zone (temperature zone close to absolute zero) are also correspondingly improved. . In the calibration of deep and low temperature temperature sensors, the temperature sensor to be measured is usually placed on the stage in the vacuum chamber. The temperature sensor and heater near the table are controlled to realize the calibration of different temperature points of the temperature sensor. Usually, a low-tempe...

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Problems solved by technology

[0005] In view of the defects in the field of low-temperature measurement in the prior art, and the low-temperature temperature control platform can provide the temperature precision control of the above-mentioned low-temperature area, the low-temperature temperature

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