Acoustic transducer unit, preparation method thereof, and acoustic transducer
A technology of energy conversion unit and sound wave, which is applied in the direction of fluid using vibration, etc., and can solve problems such as device reliability and adverse effects on life
Active Publication Date: 2022-04-26
BEIJING BOE TECH DEV CO LTD +1
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
At present, the CMUT devices on the market need to preset a large pull-in working voltage to achieve the effect of diaphragm tension, so as to improve sensitivity and achieve a large emission sound intensity. It is usually difficult to achieve a large pull-in working voltage, which requires High-standard power chip; in addition, CMUT works at high voltage for a long time, which will have a negative impact on the reliability and life of the device
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0056] In order to enable those skilled in the art to better understand the technical solution of the present invention, an acoustic wave transducer unit, a manufacturing method thereof, and an acoustic wave transducer provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0057] In the following embodiments, the sound waves are described as ultrasonic waves, where the ultrasonic waves refer to sound waves with a frequency of 20 kHz to 1 GHz; of course, the technical solution of the present disclosure is also applicable to sound waves of other frequencies.
[0058] figure 1 A schematic cross-sectional view of an acoustic wave transducer unit provided by an embodiment of the present disclosure, as shown in figure 1 As shown, the acoustic wave transducing unit includes: a base substrate 1, a first electrode 2, a support pattern 3, a diaphragm pattern 4, a second electrode 5 and a first dielectric pattern 8, and the firs...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The present disclosure provides an acoustic wave transducer unit, comprising: a base substrate, a first electrode, a support pattern, a diaphragm pattern and a second electrode, the first electrode is located on the base substrate, and the support pattern is located away from the substrate from the first electrode One side of the substrate is surrounded by a vibration cavity. The diaphragm pattern is located on the side of the support pattern away from the first electrode and can vibrate in the vibration cavity. The second electrode is located on the side of the diaphragm pattern away from the first electrode and is connected to the first electrode. The electrodes are arranged oppositely; it also includes: a first dielectric pattern and / or a second dielectric pattern, the first dielectric pattern is located at the bottom of the vibration cavity, and the thickness of the first dielectric pattern gradually increases in the direction from the center of the first dielectric pattern to the edge Increase; the second dielectric pattern is located at the top of the vibration cavity, and the thickness of the second dielectric pattern gradually increases in the direction from the center of the second dielectric pattern to the edge. The disclosure also provides a preparation method of the acoustic wave transducer unit and the acoustic wave transducer.
Description
technical field [0001] The disclosure relates to an acoustic wave transducer unit, a preparation method thereof, and an acoustic wave transducer. Background technique [0002] Ultrasonic detection has applications in medical imaging, treatment, industrial flow meters, automotive radar, and indoor positioning. The acoustic wave transducer is a kind of equipment that can be used for ultrasonic detection, and the acoustic wave transducer unit is the core device in the acoustic wave transducer. [0003] The capacitive micromachined ultrasonic transducer unit CMUT has been widely recognized for its good consistency and wide frequency range. At present, the CMUT devices on the market need to preset a large pull-in working voltage to achieve the effect of diaphragm tension, so as to improve sensitivity and achieve a large emission sound intensity. It is usually difficult to achieve a large pull-in working voltage, which requires High-standard power chip; in addition, CMUT works a...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/02
CPCB06B1/02B06B1/0292
Inventor 孙拓
Owner BEIJING BOE TECH DEV CO LTD