High-precision temperature compensation method for MEMS accelerometer
An accelerometer, temperature compensation technology, applied in the field of inertial sensors, can solve the problems of high use cost, error, high price of temperature turntable, etc., and achieve the effect of improving accuracy and measurement accuracy
Active Publication Date: 2021-03-30
北京中弘泰科科技有限公司 +2
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[0002]MEMS (MICro EleCTRo Mechanical Systems) accelerometer is an accelerometer manufactured using MEMS technology, which needs to be calibrated with a temperature turntable to compensate for temperature errors, but the temperature turntable The price is high and the cost of use is high; "A MEMS Accelerometer Temperature Compensation Method" and "A MEMS Gyroscope High-Order Temperature Compensation Method" only make temperature compensation for the zero offset, and there are certain errors
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and the following embodiments.
[0018] The invention provides a high-precision temperature compensation method of a MEMS accelerometer, such as figure 1 shown, including the following steps:
[0019] S1: Calculate the acceleration correction δ of the MEMS accelerometer based on the fitting formula model at the current temperature;
[0020] S2: Correct the acceleration value output by the MEMS accelerometer at the current temperature to the room temperature;
[0021] S3: Obtain the scale factor and zero offset of the MEMS accelerometer at room temperature;
[0022] S4: Calculate the real acceleration value according to the scaling factor and zero offset.
[0023] The invention provides a new high-precision temperature compensation method for MEMS accelerometers. The high-precision temperature compensation method for MEMS accelerometers can well compensate the...
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The invention belongs to the technical field of inertial sensors and relates to a high-precision temperature compensation method for an MEMS accelerometer. According to the high-precision temperaturecompensation method for the MEMS accelerometer, deviation of the MEMS accelerometer caused by temperature change is well compensated, the measurement precision is effectively improved, and the high-precision temperature compensation method for the MEMS accelerometer better conforms to engineering application; a high-price temperature control rotary table and a very accurate position are not needed, batch operation can be performed, full-temperature and full-position compensation can be realized, the precision after compensation is effectively improved, and calibration of a scale factor is indirectly realized.
Description
technical field [0001] The invention relates to the technical field of inertial sensors, in particular to a high-precision temperature compensation method for MEMS accelerometers. Background technique [0002] MEMS (MICro EleCTRo Mechanical Systems) accelerometers are accelerometers manufactured using MEMS technology, which need to be calibrated with a temperature turntable to compensate for temperature errors, but the price of the temperature turntable is high and the cost of use is relatively high; "A MEMS Accelerometer Temperature Compensation Method" "A MEMS Gyroscope High-Order Temperature Compensation Method" only compensates the zero offset for temperature, and there are certain errors. Contents of the invention [0003] In order to solve the problems in the prior art, the invention provides a new high-precision temperature compensation method for MEMS accelerometers. [0004] Concrete technical scheme of the present invention is as follows: [0005] The invention...
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IPC IPC(8): G01P21/00G01C25/00
CPCG01P21/00G01C25/005
Inventor 魏勇吕康
Owner 北京中弘泰科科技有限公司