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mems broadband ultrasonic transducer array

A transducer array and transducer technology, applied in the direction of fluid using vibration, etc., can solve the problems of transducer detection range reduction, large energy attenuation, etc.

Active Publication Date: 2022-01-14
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, higher frequencies produce greater energy attenuation, resulting in reduced transducer detection range

Method used

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  • mems broadband ultrasonic transducer array
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Embodiment Construction

[0023] figure 1 and figure 2 The cross-sectional structures of piezoelectric and capacitive MEMS ultrasonic transducers are shown respectively. Both piezoelectric and capacitive MEMS ultrasonic transducers include a substrate silicon chip 100 and a transducer structure layer, and the substrate silicon chip 100 There is a concave cavity structure 101 which may be circular, hexagonal or square, and the transducer structure layer is fixedly combined with the substrate silicon wafer 100 to make the concave cavity structure 101 a vacuum cavity. Such as figure 1 As shown, the structural layers of the piezoelectric transducer include a silicon oxide layer 102 , a silicon structural layer 103 , a piezoelectric material layer 104 , a top electrolyte layer 105 , a top electrode layer 106 and an electrical connection layer 107 stacked sequentially from bottom to top. Such as figure 2 As shown, the structure layer of the capacitive transducer includes a silicon oxide layer 102 , a si...

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Abstract

A MEMS ultrasonic transducer array is disclosed, comprising one or more identical transducer units (10), each transducer unit (10) comprising several transducers with different frequency modulation structures (108), The distance between the transducers is less than or equal to half a wavelength, and the frequency modulation structure (108) is arranged on the top electrode layer or the bottom electrode layer of the transducer, and is located inside or outside the zero strain axis (109) of the transducer. In the transducer array of the present invention, several transducers with different frequency modulation structures (108) are periodically arranged at a certain interval to increase the bandwidth of the transducer array.

Description

technical field [0001] The invention relates to MEMS ultrasonic transducers. Background technique [0002] An ultrasonic transducer is a device used to emit and detect ultrasonic waves, and is widely used in underwater communications, medical imaging, industrial control, and consumer electronics. Axial resolution is a measure of the resolving power of an ultrasonic transducer along the axis of the beam. Therefore, axial resolution is an important index for ultrasonic transducers to be used in medical imaging and other fields. The size of the axial resolution is related to the length of the pulse sent and received by the ultrasonic transducer, and the shorter pulse length has better resolution. Therefore, in order to improve the axial resolution of the ultrasonic transducer, one method is to achieve a shorter pulse length by increasing the operating frequency of the ultrasonic transducer. However, higher frequencies produce greater energy attenuation, resulting in reduced ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/06
CPCB06B1/0607
Inventor 吴国强贾利成石磊孙成亮
Owner 武汉敏声新技术有限公司