Equipment synchronization control method and device, terminal and system

A technology for synchronous control and terminal control, applied in the electronic field, can solve the problems of low synchronous control efficiency, cost, and low transmission rate, and achieve the effects of improving synchronous control efficiency, shortening transmission time, and shortening the synchronous cycle

Active Publication Date: 2021-05-28
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the low transmission rate of the signal transmission interface corresponding to the differential line, which can only reach a maximum of 10Mb / s, it takes a long time to transmit interactive data, resulting in extremely low efficiency of the control terminal for synchronous control of each device terminal , needs improvement

Method used

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  • Equipment synchronization control method and device, terminal and system
  • Equipment synchronization control method and device, terminal and system
  • Equipment synchronization control method and device, terminal and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] figure 1 It is a flow chart of a device synchronization control method provided in Embodiment 1 of the present invention. This embodiment is applicable to the situation where one control terminal synchronously controls the work of multiple device terminals. This method can be configured in the control terminal provided by the embodiment of the present invention The device synchronization control device on the device is implemented, and the device can be implemented in the form of hardware and / or software. The control terminal includes a first timing signal transmission interface and a first data signal transmission interface for communicating with the outside world; wherein, the first timing signal transmission interface may be an interface set on the control terminal for transmitting timing signals, for example, may be Differential electrical signal transmission interface; the first data signal transmission interface may be a transmission interface set on the control t...

Embodiment 2

[0066] figure 2 It is a flow chart of a device synchronization control method provided by Embodiment 2 of the present invention. This embodiment is applicable to the situation where one control terminal synchronously controls the work of multiple device terminals. This method can be configured in a device terminal by the embodiment of the present invention. The device synchronization control device or terminal on the device includes a second timing signal transmission interface and a second data signal transmission interface for communicating with the outside world; wherein, the second timing signal transmission interface can be set on the device terminal. The interface for receiving timing signals, for example, may be a differential electrical signal transmission interface; the second data signal transmission interface may be set on the device terminal to transmit data information (such as operation information and synchronization control identification in this embodiment) t...

Embodiment 3

[0090] image 3 It is a signaling diagram of a device synchronization control method provided by Embodiment 3 of the present invention, Figure 4 The synchronous control sequence diagram of the control terminal and the four equipment terminals provided by Embodiment 3 of the present invention. On the basis of the above-mentioned embodiments, this embodiment provides a preferred example in which a control terminal and multiple device terminals cooperate with each other to realize synchronous control of equipment. Specifically, the method for synchronous control of equipment includes the following steps:

[0091] S301: Control terminal initialization processing.

[0092] Exemplarily, in this embodiment, after the control terminal is powered on, it needs to perform a series of initialization operations, which may specifically include: after the control terminal is powered on and reset, the timing signal is first set to The first level (such as high level), and then after receiv...

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Abstract

The embodiment of the invention discloses an equipment synchronization control method and device, a terminal and an equipment synchronization control system. The method is executed by a control terminal; the control terminal comprises a first time sequence signal transmission interface and a first data signal transmission interface; the transmission rate of the first data signal transmission interface is higher than that of the first time sequence signal transmission interface. The method comprises the following steps of: receiving operation information of current function operation sent by second data signal transmission interfaces of at least two to-be-controlled equipment terminals through the first data signal transmission interface; analyzing the operation information, and determining a synchronous control identifier of the next function operation; and sending the synchronization control identifier to the second data signal transmission interfaces of the at least two equipment terminals through the first data signal transmission interface so as to control the at least two equipment terminals to execute next function operation in the next synchronization period according to a time sequence signal and the synchronization control identifier sent by the first time sequence signal transmission interface. The synchronous efficiency of the control of the control terminal on each equipment terminal is greatly improved.

Description

technical field [0001] The present invention relates to the field of electronic technology, in particular to a device synchronization control method, device, terminal and system. Background technique [0002] With the development of automation technology, it has become a common method in the field of manufacturing to control the work of multiple equipment terminals synchronously by one control terminal. For example, in the process of producing integrated circuits, multiple lithography machines can be synchronously controlled by one control terminal. Simultaneous production of integrated circuits. [0003] The current device synchronization control method is that each device terminal and the control terminal complete the data interaction in the process of device synchronization control through three pairs of differential transmission lines. Among them, the first pair of differential lines is used to provide synchronous clocks, and the other two pairs of differential lines Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/042
CPCG05B19/0423G05B2219/25257
Inventor 张骥朱晶
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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