The invention discloses an intelligent correction device control system for a super-resolution photoetching precision mask. The control system is combined with an optical system to realize accurate expected mask deformation control. The master control of the intelligent control system is completed through a high-performance industrial personal computer, and the intelligent control system comprisesan upper computer control system, an image acquisition subsystem, an image processing subsystem, an alignment subsystem, an illumination subsystem and a sixteen-path independent fine adjustment maskdeformation control subsystem. Through combined control of all subsystems of the control system, expected precise mask deformation control can be achieved, and compared with an existing implementationmethod, the steps are simpler and more convenient, and implementation of the control system is more economical. In addition, the control system adopts a PCIe channel and an independent display card to transmit and process an alignment image signal, and mask precision deformation control adopts a PID closed-loop control algorithm to realize precision regulation and control, so that the subsystem efficiency is improved, and the system can realize mask deformation control and alignment more quickly and accurately.