An in-plane two-dimensional positioning platform with low crosstalk motion driven by electrostatic comb teeth

Abstract

The invention discloses an electrostatic comb-driven in-plane two-dimensional positioning platform with low crosstalk movement, which includes an outer frame, an inner frame, a displacement platform, a first elastic unit, a second elastic unit, a first comb unit and a second Comb unit, wherein the outer frame supports the inner frame through the first elastic unit so that the outer frame can drive the inner frame along the first direction, and the inner frame supports the inner frame through the second elastic unit The displacement stage is supported so that the inner frame can drive the displacement stage along the second direction, the fixed comb portion of the first comb unit is fixedly connected to the outer frame, and the first comb unit is fixedly connected to the outer frame. The movable comb portion of the comb unit is fixedly connected to the inner frame, the fixed comb portion of the second comb unit is fixedly connected to the inner frame, and the movable comb of the second comb unit The tooth portion is fixedly connected to the displacement platform. The invention not only has performance advantages such as no hysteresis and no displacement attenuation, but also can realize low crosstalk movement.

Description

technical field [0001] The invention relates to the technical field of precision positioning systems, in particular to an in-plane two-dimensional positioning platform with low crosstalk motion driven by electrostatic combs. Background technique [0002] With the rapid development of system integration of micro-nano devices, precision positioning system occupies an extremely important position in the field of modern cutting-edge industrial production and cutting-edge scientific research. link. [0003] In the prior art, the mainstream positioning system that can meet the above performance requirements is a piezoelectric ceramic displacement platform, which has the advantages of nanometer-level resolution, fast response, and large driving force. However, the piezoelectric ceramic drive itself has many defects: (a) the size of the driving displacement is closely related to the thickness of the piezoelectric ceramic material, and multi-directional driving requires the superpos...

AI Technical Summary

Problems solved by technology

However, the piezoelectric ceramic drive itself has many defects: (a) the driving displacement is closely related to the thickness of the piezoelectric ceramic material, and the multi-dimensional direction drive requires the superposition of multiple drive units, resulting in a large structural size of the entire system; (b) Piezoelectric drive has hysteresis, and additional closed-loop feedback control is required to achieve high-precision positioning; (c) piezoelectric drive displacement is severely attenuated at low temperatures; (d) motion transmission and conversion are realized through flexible hinges, and the resonance frequency is low

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