Electrostatic comb tooth driving type low-crosstalk motion in-plane two-dimensional positioning platform

A two-dimensional positioning and driving technology, used in measuring devices, instruments, etc., can solve the problems of piezoelectric drive displacement attenuation, large system structure size, low resonance frequency, etc. Voltage uncoupling, the effect of increasing the maximum displacement stroke

Active Publication Date: 2021-06-04
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the piezoelectric ceramic drive itself has many defects: (a) the driving displacement is closely related to the thickness of the piezoelectric ceramic material, and the multi-dimensional direction drive requires the superposition of multiple drive units, resulting in a large structural size of the entire system; (b) Piezoelectric drive has hysteresis, and additional closed-loop feedback control is required to achieve high-precision positioning; (c) piezoelectric drive displacement is severely attenuated at low temperatures; (d) motion transmission and conversion are realized through flexible hinges, and the resonance frequency is low

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  • Electrostatic comb tooth driving type low-crosstalk motion in-plane two-dimensional positioning platform
  • Electrostatic comb tooth driving type low-crosstalk motion in-plane two-dimensional positioning platform
  • Electrostatic comb tooth driving type low-crosstalk motion in-plane two-dimensional positioning platform

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Embodiment Construction

[0029] In order to make the technical problems, technical solutions and beneficial effects to be solved by the embodiments of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0030] It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be used for both fixing function and circuit communication function.

[0031] It is to be understood that the terms "length", "width", "top", "bottom", "front"...

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Abstract

The invention discloses an electrostatic comb tooth driving type low-crosstalk motion in-plane two-dimensional positioning platform which comprises an outer frame, an inner frame, a displacement table, a first elastic unit, a second elastic unit, a first comb tooth unit and a second comb tooth unit. The outer frame supports the inner frame through the first elastic unit so that the inner frame can be driven by the outer frame in the first direction, and the displacement table can be supported by the inner frame through the second elastic unit so that the displacement table can be driven by the inner frame in the second direction. The fixed comb tooth part of the first comb tooth unit is fixedly connected to the outer frame, the movable comb tooth part of the first comb tooth unit is fixedly connected to the inner frame, the fixed comb tooth part of the second comb tooth unit is fixedly connected to the inner frame, and the movable comb tooth part of the second comb tooth unit is fixedly connected to the displacement table. The platform has the performance advantages of no lag, no displacement attenuation and the like, and can also realize low-crosstalk motion.

Description

technical field [0001] The invention relates to the technical field of precision positioning systems, in particular to an electrostatic comb-driven low-crosstalk motion in-plane two-dimensional positioning platform. Background technique [0002] With the rapid development of micro-nano device system integration, the precision positioning system occupies an extremely important position in the fields of modern cutting-edge industrial production and cutting-edge scientific research. links. [0003] In the prior art, the mainstream positioning system that can meet the above performance requirements is a piezoelectric ceramic displacement platform, which has the advantages of nanoscale resolution, fast response, and large driving force. However, the piezoelectric ceramic drive itself has many defects: (a) the driving displacement is closely related to the thickness of the piezoelectric ceramic material, and the multi-dimensional direction drive requires the superposition of mult...

Claims

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Application Information

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IPC IPC(8): G01B21/00
CPCG01B21/00
Inventor 薛高鹏李星辉王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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