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Vacuum pump

A technology of vacuum pump and rotor, applied in the direction of pump, pump element, axial flow pump, etc.

Active Publication Date: 2021-06-11
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006]However, vacuum pumps are also exposed to harsh environments, including cryogenic
Exposure to low temperatures causes significant thermal shrinkage of the sleeves and / or rotors of vacuum pumps that are not operating

Method used

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  • Vacuum pump
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Examples

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Embodiment Construction

[0030] figure 1The vacuum pump according to the invention shown in is a turbomolecular vacuum pump comprising a housing 10 with an inlet 12 and an outlet 14 . The rotor 16 is arranged in a housing which includes a rotor shaft 18 and rotor elements 20 configured as blades. Furthermore, said vacuum pump comprises a stator interacting with a rotor element 20 of the rotor 16 , the stator being constructed of vanes 22 connected to the housing 10 . The rotor shaft 18 is formed by a first bearing 24 configured as a permanent magnetic bearing and in figure 1 A second bearing 26 configured as a ball bearing in the exemplary embodiment is rotatably supported in the housing 10 .

[0031] The rotor 16 is rotated by an electric motor 28 , whereby the gaseous medium is conveyed from the inlet 12 to the outlet 14 .

[0032] The rotor 16 includes a cantilevered end portion defining a recess, wherein the first bearing 24 is arranged within this recess. A protrusion 30 connected to the hous...

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PUM

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Abstract

Vacuum pump, in particular a turbomolecular vacuum pump, comprising a stator and a rotor having at least one rotor element rotatable relatively to the stator. The rotor is supported by at least permanent magnetic bearing having a first magnetic element connected to the stator and a second magnetic element connected to the rotor. The second magnetic element is connected to the rotor via a sleeve having a radial inner side in direct contact with the second magnetic element and a radial outer side towards the rotor. Thereby, the outer side comprises at least one groove and / or at least one web.

Description

technical field [0001] The present invention relates to a vacuum pump, and in particular to a turbomolecular vacuum pump. Background technique [0002] Known vacuum pumps comprise a housing with an inlet and an outlet, to which a stator is connected. A rotor is housed within the housing and is rotatably supported by bearings. The rotor comprises at least one rotor element to interact with the stator to convey the gaseous medium from the inlet to the outlet. In the case of turbomolecular vacuum pumps, the stator is constructed from a plurality of blades, which interact with rotor elements, which are also configured as blades. [0003] It is known to use permanent magnetic bearings in order to support the rotor. A permanent magnet bearing includes a first magnetic element connected to the stator and a second magnetic element connected to the rotor, the first and second magnetic elements being placed in close proximity to each other and configured to repel each other. There...

Claims

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Application Information

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IPC IPC(8): F04D19/04F16C35/00H02K7/09F04D29/058F16C32/04
CPCF04D19/042F04D19/048F04D29/058H02K7/09F16C2360/44F05D2240/61F16C32/0425F16C2360/45
Inventor E·K·许I·M·米尔扎
Owner EDWARDS LTD