High temperature resistant Fabry-Perot cavity sensing structure and system with micro-nano structure
A technology with micro-nano structure and high temperature resistance, which is applied in the field of sensors and can solve problems such as inaccurate measurement structures and damage
Active Publication Date: 2022-04-26
ZHONGBEI UNIV +1
View PDF22 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0003] Generally in the prior art, the use environment of temperature sensor, humidity sensor, pressure sensor, sound sensor, refractive index sensor is all in normal environment, existing temperature sensor, humidity sensor, pressure sensor, sound sensor, refractive index sensor In extremely high temperature environments, it may be damaged or make the measurement structure inaccurate
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is an embodiment of the present invention, but not all embodiments. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.
[0024] Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without cr...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The present application relates to a high temperature resistant Fabry-Perot cavity sensing structure and system of a micro-nano structure, and specifically relates to the field of sensors. The high-temperature-resistant Fabry-Perot cavity sensing structure of the micro-nano structure provided by the application includes: a main body structure, a first volume grating, a second volume grating and an optical fiber; The two opposite surfaces are provided with a first volume grating and a second volume grating, and the outside of the main structure is provided with an optical fiber. Since the first volume grating and the second volume grating are provided on both sides of the Winfabry-Perot cavity, the main body The holes in the structure constitute a Fabry-Perot cavity. When it is necessary to measure the information to be measured, the structure of the present application is set in the environment to be tested. When the factors to be measured in the environment to be measured change, the Fabry ‑The beam interference spectrum line inside the Perot cavity drifts. By detecting the beam interference spectrum line and according to the corresponding relationship between the change of the beam interference spectrum line and the factor to be measured, the amount of the factor to be measured is obtained.
Description
technical field [0001] The present application relates to the field of sensors, in particular, to a micro-nano structure high temperature resistant Fabry-Perot cavity sensing structure and system. Background technique [0002] High-precision sensors have a wide range of needs in aerospace, weapon testing, oil exploration, mining and metallurgy, and are used in various aspects, such as the detection of temperature, humidity, pressure, sound, and refractive index. [0003] Generally in the prior art, the use environment of temperature sensor, humidity sensor, pressure sensor, sound sensor, refractive index sensor is all in normal environment, existing temperature sensor, humidity sensor, pressure sensor, sound sensor, refractive index sensor In an extremely high temperature environment, it may be damaged or make the measurement structure inaccurate. [0004] Therefore, there is a need for a temperature sensor, humidity sensor, pressure sensor, sound sensor, and refractive ind...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/353G01D21/02
CPCG01D5/35312G01D21/02
Inventor 郑永秋田振男薛晨阳于永森孙鹏国旗陈坤陈晨武丽云陈佳敏韩源
Owner ZHONGBEI UNIV