A method of forming gratings

Abstract

Embodiments of the disclosure generally relate to methods of forming gratings. The method includes depositing a resist material on a grating material disposed over a substrate, patterning the resist material into a resist layer, projecting a first ion beam to the first device area to form a first plurality of gratings, and projecting a second ion beam to the second device area to form a second plurality of gratings. Using a patterned resist layer allows for projecting an ion beam over a large area, which is often easier than focusing the ion beam in a specific area.

Description

technical field [0001] Embodiments of the present disclosure relate generally to a method, and more particularly to a method of forming a grating. Background technique [0002] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has a distinct physical presence. A virtual reality experience can be generated in 3D and viewed through a head-mounted display (HMD), such as glasses or other wearable display devices with a near-eye display panel as a lens, to display a virtual reality environment that replaces the real environment . [0003] Augmented reality, however, enables an experience in which the implementer can still view the surrounding environment through the display lenses of glasses or other HMD devices, and can also see images of virtual objects that are generated for display and appear as part of the environment. Augmented reality can include any type of input, such as audio and tactile input, as well as virtua...

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Problems solved by technology

Furthermore, some lithographic methods do not have the capability to fabricate variation detection and profiles of gratings in different waveguides

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