Sample pre-tilt loading device for EBSD (electron back scattered diffraction) experiment

Abstract

The invention provides a sample pre-tilting loading device for an EBSD experiment. The sample pre-tilting loading device comprises a frame body; the loading assembly comprises a base and a loading unit, the base is detachably arranged on the frame body, the base is provided with a placing part, a reference part and a connecting part which are sequentially connected, the connecting part is used for being connected with a testing device, the reference part is provided with an inclined reference surface, the placing part is provided with a placing cavity and an opening communicated with the placing cavity, and the opening and the inclined reference surface are located on the same side of the base, the loading unit has a rotating state of rotating relative to the placing cavity and a moving state of moving relative to the placing cavity, the loading unit is provided with a loading surface, and the loading surface faces the opening and is used for placing samples; the driving mechanism is arranged on the frame body and is in driving connection with the loading unit, and the driving mechanism is used for adjusting the position of the sample on the base, so that the sample detection surface and the inclined reference surface are on the same plane. Through the technical scheme provided by the invention, the problems of low sample mounting precision and low experimental result accuracy in the prior art can be solved.

Description

technical field [0001] The invention relates to the technical field of sample loading devices, in particular to a sample pre-tilt loading device for EBSD experiments. Background technique [0002] At present, when testing the microscopic texture of the Electron Backscatter Diffraction Pattern (EBSD), the sample needs to be placed on the plane of the electron beam focus of the scanning electron microscope, and the test area on the upper surface of the sample is kept at an inclination angle of 70 degrees from the horizontal plane, so that the sample carry out testing. In the prior art, the sample is usually fixed on a pre-tilted sample stage, and the X, Y, and Z axes of the scanning electron microscope are moved so that the electron beam emitted by the scanning electron microscope is irradiated on the surface of the sample along a preset angle. Experimenting with the above-mentioned scheme cannot automatically find the pre-tilt plane for the sample, and requires visual observ...

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