Process-insensitive modulator
A modulator, sensitive technology, applied in the direction of instruments, nonlinear optics, optics, etc., can solve the problem that the performance of the modulator is affected by the manufacturing process
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[0027] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION The specific embodiments of the present application will be further specified.
[0028] Silicon-based optical electronics as an important solution for large-scale integrated optical paths, in recent years, the industry has put more and more research. With the discomfort of Moore's law, the development of optical electronic integration technology is of great significance to the advancement of chip integration technology. The optical modulator is a key active device of the light-emitting end, which is sufficient to affect the signal processing capability of the entire optical network, but there are still many problems in the current modulator miniaturization and high modulator rate.
[0029] The silicon-based microproelectric resonant cavity electro-optic modulator is not only small and has high process sensitivity, as a solution for miniaturization of modulators, which utilizes optical coupling principle to ac...
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