A Process Insensitive Modulator
A modulator, sensitive technology, applied in instrumentation, nonlinear optics, optics, etc., can solve the problem that the performance of the modulator is affected by the manufacturing process
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[0027] The specific implementation manner of the present application will be further specifically described below through specific embodiments and in conjunction with the accompanying drawings.
[0028] Silicon-based optoelectronics is an important solution for large-scale integrated optical circuits, and the industry has invested more and more in its research in recent years. With the inapplicability of Moore's Law, the development of optoelectronic integration technology is of great significance to the progress of chip integration technology. As a key active device at the optical transmitter, the performance of the optical modulator is sufficient to affect the signal processing capability of the entire optical network. However, there are still many problems in the miniaturization and high modulation rate of the modulator.
[0029] The silicon-based microring resonator electro-optic modulator is not only small in size but also has high process sensitivity. As a solution to re...
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