Platform for detecting performance of vacuum chuck
A vacuum chuck, performance technology, used in measuring devices, testing of mechanical components, testing of machine/structural components, etc.
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] refer to Figure 1-4 , a platform for performance testing of vacuum chucks, including a main machine 1; a set of Y-direction slide rails 21 is fixedly arranged on the surface of the main machine 1, and a slide table 22 is provided for sliding on the Y-direction slide rails 21. The table 22 is a Y-direction driving device that slides along the Y-direction slide rail 21. A set of X-direction slide rails 31 is fixedly arranged on the upper surface of the s...
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