Unlock instant, AI-driven research and patent intelligence for your innovation.

Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus

A technology of piezoelectric devices and piezoelectric layers, applied in printing and other directions, can solve problems such as cracks or burnt, undefined, cracks or burnt at the boundary

Pending Publication Date: 2022-05-06
SEIKO EPSON CORP
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Therefore, defects such as cracks and burning tend to occur near the boundary between the active part and the inactive part of the piezoelectric layer, that is, near the end of the second electrode.
In particular, when the driving pulse supplied from the electrodes to the piezoelectric layer becomes high frequency, since the strain action of the active portion becomes high frequency, defects such as cracks and burning tend to occur in the above-mentioned boundary portion.
[0008] In addition, such problems are not limited to liquid ejection heads typified by ink jet recording heads that eject ink, but also exist in other piezoelectric devices.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
  • Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
  • Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0025] figure 1 It is an exploded perspective view of an ink jet recording head which is an example of the liquid ejection head according to Embodiment 1 of the present invention. figure 2 A plan view of the recording head. image 3 for figure 2 A-A' line sectional view of Figure 4 for will image 3 An enlarged view of the piezoelectric actuator section in, Figure 5 for figure 2 The B-B' line sectional view of , and is a partially enlarged view of the piezoelectric actuator. also, Figure 6 It is an enlarged cross-sectional view showing the main part of the second electrode.

[0026] As shown in the figure, an inkjet type recording head (hereinafter, simply referred to as a recording head) 1 , which is an example of a liquid ejection head according to this embodiment, is directed toward the Z-axis direction as the first direction, more specifically, toward +Z. A recording head that ejects ink droplets in a direction.

[0027] As an example of a substrate, the ink...

Embodiment approach 2

[0099] Figure 8 It is a cross-sectional view of an ink jet recording head as an example of the liquid ejection head according to Embodiment 2 of the present invention, and is an enlarged view showing the structure of the piezoelectric actuator 300 . In addition, the same code|symbol is attached|subjected to the same member as Embodiment 1, and duplicative description is abbreviate|omitted.

[0100] Such as Figure 8 As shown, the piezoelectric actuator 300 according to this embodiment includes the protective film 200 provided on the −Z direction side of the second electrode 80 , that is, on the second electrode 80 . The end portion 80 b of the second electrode 80 in the second region S2 is covered with the protective film 200 . That is, the protective film 200 is provided to cover the boundary portion between the active portion 310 and the inactive portion 320 of the piezoelectric actuator 300 . In addition, the structure other than the protective film 200 is the same as t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a piezoelectric device, a liquid ejecting head, and a liquid ejecting apparatus that suppress the occurrence of defects such as cracks or burnout of a piezoelectric layer in the vicinity of an end portion of a second electrode. A liquid ejecting head includes a vibrating plate provided on one surface side of a substrate, and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode stacked in a first direction on a surface side of the vibrating plate opposite to the substrate. When one of two regions of the second electrode in a second direction intersecting the first direction is defined as a first region, and one region closer to the end of the second electrode is defined as a second region, the second electrode is formed such that the rigidity in the first direction in the second region is 17000 N / m or more, and the rigidity in the second direction in the second region is 17000 N / m or more. The length of the piezoelectric layer in the first direction in the second region is equal to or less than the length of the piezoelectric layer in the first direction in the second region, and the rigidity of the piezoelectric layer in the second region is higher than the rigidity in the first direction in the first region.

Description

technical field [0001] The present invention relates to a piezoelectric device including a vibration plate and a piezoelectric actuator including a first electrode, a piezoelectric layer, and a second electrode, a liquid ejection head, and a liquid ejection device. Background technique [0002] As a representative example of the liquid ejection head which is one of the piezoelectric devices, an inkjet type recording head ejecting ink droplets can be cited. As an ink jet type recording head, there is known an ink jet type recording head including a flow channel forming substrate on which a pressure chamber communicating with a nozzle is formed, and one surface of the flow channel forming substrate via a vibrating plate. The piezoelectric actuator on the side is used to change the pressure of the ink in the pressure chamber through the piezoelectric actuator, thereby ejecting ink droplets from the nozzle. [0003] In addition, as a piezoelectric actuator, there is known a pie...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/045B41J2/01B41J2/14
CPCB41J2/045B41J2/01B41J2/14201B41J2/14233B41J2002/14491B41J2002/14419B41J2/1623B41J2/161B41J2/04541
Inventor 高部本规森政贵
Owner SEIKO EPSON CORP