Multi-partition column gating VCSEL area array laser module testing device and method thereof

Abstract

The invention discloses a multi-partition column gating VCSEL area array laser module testing device and method, and belongs to the technical field of photoelectric device testing, the device comprises a bottom plate, an electric guide rail is arranged on the bottom plate, a module support is arranged on the electric guide rail, a laser module is detachably arranged on the module support, and a detection piece used for pressing and testing the laser module is arranged above the module support in a lifting mode; a light outlet window is formed in the position, used for installing the laser module, of the module support, an integrating sphere and an optical assembly are arranged on the two sides of the module support respectively and are both arranged on the electric guide rail, and the light inlet end of the integrating sphere and the light inlet end of the optical assembly are both located below the light outlet window; the detection piece comprises a driving plate, a plurality of driving circuits are arranged in a plate body of the driving plate, a cathode probe is arranged on the plate body of the driving plate, a plurality of anode probes are arranged on the two sides of the cathode probe in an array mode, and the cathode probe and the anode probes are all electrically connected to the driving circuit; and the two anode probes are correspondingly and electrically connected with a driving circuit through the cathode probe.

Description

technical field [0001] The invention belongs to the technical field of optoelectronic device testing, and particularly relates to a testing device and a method for a multi-partition column-gated VCSEL area-array laser module. Background technique [0002] The multi-partition column-gated VCSEL area array laser module is more and more widely used in the field of all-solid-state laser radar. It can replace traditional MEMS, galvanometer, and rotating polyhedral prism scanning to realize all-solid-state scanning, which is reliable for improving the overall performance of the radar. Sex is very important. However, the driving test technology for multi-partition column-gated VCSEL area array laser modules is not mature. At present, the driving methods used in the test of the partition column gated VCSEL area array laser module are mainly DC continuous test, or single-channel driving circuit single-partition test and single-channel driving circuit full-area test method. [0003]...

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Problems solved by technology

[0003] Due to the relatively large current, high calorific value, and prominent heat dissipation problems in the DC test, it is difficult for the laser to work at a high power; the partition test operation of the single-channel drive is more complicated, and it is necessary to test the VCSEL array after testing a partition. The bonding gold wires of this partition are artificially cut off under a microscope, and then other partitions are selected for bonding gold wires to be tested again; for the full-area test of a single-channel drive circuit, because the size of the VCSEL chip is large, the pads are relatively large, and the drive The electrical circuit is long and the parasitic parameters are large, so it will cause serious secondary oscillation and widening of the pulse width. At the same time, due to the long circuit, it will also cause delay problems in different partitions, resulting in multi-pulse oscillation and narrow pulse conditions. The single-channel driving current under the condition is low, and the driving current demand for the VCSEL area array that requires hundreds or even thousands of amperes is far from enough

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