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Actuator and fluid control device

A technology of fluid control devices and actuators, which is applied in piezoelectric devices/electrostrictive devices, machines/engines, liquid variable capacity machines, etc., and can solve problems such as easy deformation, damage, and deformation of the joints. Achieve unbreakable effect

Pending Publication Date: 2022-07-12
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, since the connecting portion shown in Patent Document 1 has a shape that is easily deformed, it is easily damaged by an external impact or the like.
Also, when a pressure difference occurs between the upper and lower surfaces of the actuator including the vibrating plate and the connecting portion (upper and lower surfaces of the vibrating plate) due to the operation of a pump as an example of the fluid control device, the connecting portion is deformed, and the This causes stress on the driving body arranged on the vibration plate, and the driving body is easily damaged

Method used

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  • Actuator and fluid control device
  • Actuator and fluid control device
  • Actuator and fluid control device

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Experimental program
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no. 1 approach

[0020] A fluid control device according to a first embodiment of the present invention will be described with reference to the drawings. figure 1 It is an exploded perspective view of the fluid control device including the actuator according to the first embodiment. figure 2 It is a cross-sectional view showing the configuration of the fluid control device according to the first embodiment. image 3 It is a plan view of the flat plate including the first main board of the actuator according to the first embodiment. Furthermore, in image 3 , the difference in thickness is represented by the difference in hatching.

[0021] In addition, in each drawing shown in the following respective embodiments, in order to facilitate the understanding of the description, the shape of each component is partially or entirely described in an exaggerated manner. In addition, in order to make it easy to read the drawings, the reference numerals are partially omitted for the constituent eleme...

no. 2 approach

[0050] A fluid control device according to a second embodiment of the present invention will be described with reference to the drawings. Figure 5 It is a cross-sectional view showing the configuration of the fluid control device according to the second embodiment.

[0051] like Figure 5 As shown, the fluid control device 10B according to the second embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of the actuator 11B. The other structures of the fluid control device 10B are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0052] The actuator 11B includes the first main board 21B. The first main board 21B has a first area 201 and a second area 202 . The first area 201 and the second area 202 are arranged in this order from the center of the first main board 21B toward the outer edge. In other words, the first area 201 is an area that does not include the outer ed...

no. 3 approach

[0060] A fluid control device according to a third embodiment of the present invention will be described with reference to the drawings. Image 6 It is a cross-sectional view showing the configuration of the fluid control device according to the third embodiment.

[0061] like Image 6 As shown, the fluid control device 10C according to the third embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of the actuator 11C. The other structures of the fluid control device 10C are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0062] The actuator 11C includes a first main board 21C. The first main board 21C has a first area 201 and a second area 202 . The first region 201 and the second region 202 are arranged in this order from the center of the first main board 21C toward the outer edge.

[0063] The thickness D201 of the first region 201 is greater than the thickness D...

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Abstract

The invention relates to an actuator and a fluid control device. An actuator (11) is provided with a first main plate (21) on which a piezoelectric element (30) is disposed, a frame body (22), and a connection part (23). The frame body (22) is arranged on the outer side of the outer edge of the first main plate (21) and is separated from the first main plate (21). The connecting part (23) is arranged between the first main plate (21) and the frame body (22). The connecting part (23) is provided with a plurality of connecting bodies (231) arranged along the outer edge and gaps (232) between the plurality of connecting bodies (231), and the plurality of connecting bodies (231) are connected with the first main plate (21) and the frame body (22). The first main plate (21) and the connecting body (231) are made of the same material. The thickness (D23) of the connecting body (231) is larger than the thickness (D21) of the first main plate (21).

Description

technical field [0001] The present invention relates to an actuator including a vibrating plate and a mechanism for supporting the plate to vibrate, and a fluid control device including the actuator. Background technique [0002] In Patent Document 1, a fluid control device including a diaphragm unit is described. The diaphragm unit of Patent Document 1 includes a diaphragm, a frame plate, and a connecting portion. The frame plate is a shape surrounding the outer edge of the vibration plate. The connection portion connects the outer edge of the vibration plate to the frame plate. [0003] At this time, the connection portion is formed of a shape that is easily deformed, and elastically supports the diaphragm. Thereby, even if the frame plate is fixed, the vibration plate can perform predetermined bending vibration. [0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2013-57247 [0005] However, since the connection part shown in patent document 1 is ea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04
CPCF04B43/046F04B45/047H10N30/20F04B43/04E04B2001/3223E04B2001/3258E04B2001/327
Inventor 川端友德田中伸拓
Owner MURATA MFG CO LTD