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Method for manufacturing thin-film magnetic head and manufacturing device thereof

A technology of thin-film magnetic head and manufacturing method, which is applied to the direction of magnetic head using thin film, magnetic recording head, and the surface of magnetic head, which can solve the problems of unstable floating characteristics and scratches, so as to improve quality and effective productivity, and prevent scratches , The effect of reducing the setting error

Inactive Publication Date: 2005-02-09
TDK CORPARATION
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  • Description
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Problems solved by technology

[0021] Scratches that appear on the exposed surface 3a of the rod-shaped slider 3 are retained as scratches on the exposed surface of the slider, so that the floating characteristics when floating on the recording medium are also unstable. , or the problem of scratches on the surface of the recording medium

Method used

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  • Method for manufacturing thin-film magnetic head and manufacturing device thereof
  • Method for manufacturing thin-film magnetic head and manufacturing device thereof
  • Method for manufacturing thin-film magnetic head and manufacturing device thereof

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Embodiment Construction

[0078] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0079] as Figure 5 As shown, the manufacturing process of the thin film magnetic head is made of such as alumina-titanium carbide (Al 2 o 3 - On a substrate 2 made of materials such as TiC), a number of thin film magnetic elements 1 are formed through a thin film processing procedure. Such as Figure 5 The substrate 2 shown is in the shape of a disc, and several thin film magnetic elements 1 located on the substrate 2 are formed in a row at certain intervals, and of course they can also be formed in several rows.

[0080] 7 is a partially enlarged cross-sectional view showing the thin-film magnetic element 1 formed on the rod-shaped slider (slider) 3 cut along the exposed surface (ABS surface) 3a. The thin-film magnetic element 1 is a laminated compound element composed of an inductive magnetic head part and a magnetoresistive magnetic head part using...

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Abstract

In a thin-film magnetic head manufacturing method and apparatus, lapping is continued until the MR height of a magnetoresistive sensor falls into a finish tolerance range and the lapping time from the beginning of lapping exceeds a predetermined time, thereby substantially reducing the recession between an ABS of a slider bar and a surface of a thin-film magnetic element opposing a recording medium.

Description

technical field [0001] The present invention relates to a thin-film magnetic head manufacturing method and a manufacturing apparatus capable of performing high-precision polishing when polishing a thin-film magnetic head used in, for example, a magnetic disk device. Background technique [0002] Existing thin-film magnetic heads are usually made of aluminum oxide-titanium carbide (Al 2 o 3 - On a substrate made of materials such as TiC), thin film layers constituting thin film magnetic elements, such as insulating layers, magnetic layers, and conductive layers, are sequentially stacked by methods such as sputtering, and then, as required, by methods such as photolithography Manufactured by processing each thin film layer using methods such as ion milling and ion milling. [0003] With this thin film magnetic head manufacturing method, it is possible to Figure 5 Several thin-film magnetic elements 1 in several rows are formed on the substrate 2 shown (in Figure 5 only a p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B5/127G11B5/187G11B5/31G11B5/39G11B33/10
CPCG11B5/3903G11B5/3169G11B5/1871G11B5/3173Y10T29/49034G11B33/10G11B5/3166Y10T29/49041
Inventor 加藤政人宫岛茂信
Owner TDK CORPARATION
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