Grey mask and method for making same

A technology of gray-tone mask and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, photolithographic process of patterned surface, optics, etc., and can solve problems such as difficulty in precise control of film thickness, large aspect ratio, and practical difficulties
CN1287221CInactive Publication Date: 2006-11-29HOYA CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
HOYA CORP
Publication Date
2006-11-29
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The present invention provides one kind of grey mask capable of making transmissivity controllable and homogeneous film thickness and its making process. For example, on the transparent substrate, transmissivity controllable film, low transmissivity film and photoresist film are formed successively; the photoresist film and the low transmissivity film in some part are eliminated to form transparent part; and the photoresist film and partial low transmissivity film in some other part are eliminated to form grey part and to make grey mask.
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Description

technical field

[0001] The present invention relates to a gray tone mask, its manufacturing method and the like. Background technique

[0002] In recent years, in the field of masks for large LCDs, attempts have been made to reduce the number of masks using grayscale masks (Monthly FPD Intelligence, May 1999).

[0003] Here, a grayscale mask, for example, such as Figure 5 As shown in (1), it has a light-shielding part 1 , a light-transmitting part 2 and a gray tone part 3 . The gray-tone part 3 is an area where a fine light-shielding pattern 3a is formed within the resolution limit of a large-scale LCD exposure machine using a gray-tone mask. The purpose of its formation is to reduce the amount of light transmitted through this area and reduce The thickness of the photoresist film can optionally be changed according to the amount of irradiation. Both the light-shielding portion 1 and the fine light-shielding pattern 3a are generally formed of films of the same thickness m...

Claims

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