Grey mask and method for making it

A technology of gray-tone mask and manufacturing method, which is applied in the direction of semiconductor/solid-state device manufacturing, photolithographic process exposure device, patterned surface photolithographic process, etc. Long time and other issues

A technology of gray-tone mask and manufacturing method, which is applied in the direction of semiconductor/solid-state device manufacturing, photolithographic process exposure device, patterned surface photolithographic process, etc. Long time and other issues

CN1940719AInactive Publication Date: 2007-04-04HOYA CORP
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  • Grey mask and method for making it
  • Grey mask and method for making it
  • Grey mask and method for making it

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0083] Next, a first embodiment of the present invention will be described.

[0084]As shown in Figure 1(1), the composite data includes all the graphics data of the light-shielding part, the light-transmitting part and the gray-tone part, from the light-shielding part 1 and the light-transmitting part 2 (for example, the amorphous silicon pattern of TFT) and its surroundings The case where the gray tone portion 3 (semi-transmissive portion and semi-transmissive portion) is formed is an example. In this case, the data of the light-shielding part 1 and the light-transmitting part 2 shown in FIG. 1(2) are separated from the data of the gray tone part 3 shown in FIG. 1(3). Then, after drawing the light-transmitting portion with an exposure amount (100%) that can completely remove the resist, the gray tone portion 3 (semi-transmission portion or semi-transmission portion Light-transmitting part) can draw the graph shown in Fig. 1(1). With the drawing pattern shown in FIG. 1(1), ...

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Abstract

A method for preparing half-tone mask includes forming transmitivity control film and transmitivity reduced film as well as resist film in sequence on transparent substrate, removing off resist film and transmitivity reduced film as well as transmitivity control film on position being used to from light transmission unit for forming light transmission unit then removing off resist film and transmitivity reduced film on position being used to form half-tone unit for forming half-tone unit so as to achieve purpose of preparing half-tone mask.

Description

[0001] This application is a divisional application of a Chinese invention patent application with an application date of June 18, 2002, an application number of 02123331.4, and an invention title of "gray tone mask and its manufacturing method". technical field [0002] The present invention relates to a gray tone mask, its manufacturing method and the like. Background technique [0003] In recent years, in the field of masks for large LCDs, attempts have been made to reduce the number of masks using grayscale masks (Monthly FPD Intelligence, May 1999). [0004] Here, the gray tone mask includes, for example, a light shielding portion 1 , a light transmitting portion 2 and a gray tone portion 3 as shown in FIG. 5( 1 ). The gray-tone part 3 is an area where a fine light-shielding pattern 3a is formed within the resolution limit of a large-scale LCD exposure machine using a gray-tone mask. The purpose of its formation is to reduce the amount of light transmitted through this ...

Claims

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Application Information

Patent Timeline
04 Apr 2007
Publication
CN1940719A
IPC
G03F1/14; G03F7/09; G03F7/20; G03F7/26; H02M7/48
CPC
H02M7/53873; H02M2001/0012; H02M2007/53876; H02M1/0012; H02M7/53876
Inventors
ι‡Žζ΄₯手重德