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Organic EL device and making method, making device and liquid drop spraying out device thereof

A manufacturing method and technology for manufacturing devices, applied in the fields of organic EL devices and their manufacturing and manufacturing devices, and droplet ejection devices, capable of solving problems such as easy breakage and deterioration

Inactive Publication Date: 2006-12-20
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Like this, in the existing organic EL device manufacturing equipment that adopts functional droplet discharge head, if adopt the material that easily reacts with the oxygen element etc. in the air as light-emitting material, under normal environment, discharge Flying luminescent materials are exposed to a large area in the air, and there is a problem that it is easy to promote deterioration
In addition, the ejected luminescent material reacts with oxygen elements, etc., and there is a problem that it is easy to break during the drying process.

Method used

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  • Organic EL device and making method, making device and liquid drop spraying out device thereof
  • Organic EL device and making method, making device and liquid drop spraying out device thereof
  • Organic EL device and making method, making device and liquid drop spraying out device thereof

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Embodiment Construction

[0138] specific implementation plan

[0139] Embodiments of the present invention are described below with reference to the drawings. The inkjet head (droplet ejection head) of an inkjet printer can accurately eject tiny ink droplets (droplets) into dots, for example, by using special ink, luminescent or photosensitive resin in the droplet (jet target liquid) etc., it is expected to be applied to the field of manufacturing various components.

[0140] The manufacturing apparatus of the organic EL device of this embodiment is a device installed on a production line of a so-called flat panel display organic EL device. Ink method), the EL light emitting layer and the hole injection layer of each pixel that serve as the light emitting function of the organic EL device are formed.

[0141] For this reason, in this embodiment, first, the structure of the organic EL device will be described, and at the same time, its manufacturing method (manufacturing process) will be described. ...

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PUM

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Abstract

The invention provides a manufacturing method and manufacturing apparatus for an organic EL device, capable of effectively preventing alteration in the process of discharging a light emitting functional material to form an organic EL functional layer, an organic EL device, electronics and a liquid drop discharge device. In this manufacturing method for the organic EL element, a functional liquid discharge head 7 where a light emitting functional material is introduced is scanned relatively to a substrate W, the light emitting functional material is selectively discharged to form an organic EL functional layer in each of a number of pixel areas on the substrate W. The discharge process of discharging the light emitting functional material is performed in an atmosphere of inert gas.

Description

technical field [0001] The present invention relates to a method of manufacturing an organic EL device using a representative functional droplet discharge head among inkjet heads, a manufacturing device thereof, an organic EL device, an electronic device, and a droplet discharge device. Background technique [0002] Previously, the manufacturing method and the manufacturing device of the organic EL device using such a functional droplet discharge head have not yet entered the practical stage, but they have been known in theory. At this time, a liquid luminescent material as a functional liquid is introduced into a functional liquid droplet discharge head, and is discharged in a plurality of pixel regions, and then the solvent in the luminescent material is vaporized (dried) to form an organic EL light emitting layer. [0003] The problem to be solved by the invention [0004] Like this, in the existing organic EL device manufacturing equipment that adopts functional droplet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05B33/10B05D7/00B41J2/01B41J2/145B41M3/00H10K99/00
CPCB41M3/006B41J2/145B41J2202/09H01L27/3211H01L27/3244H01L27/3295H01L51/0005H01L51/56H10K59/35H10K59/122H10K71/135H05B33/10H10K59/12H10K71/00
Inventor 林高之
Owner TOKYO ELECTRON LTD