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Production device and production method for organic EL dispaly

A technology for manufacturing devices and displays, which is applied in the fields of organic semiconductor devices, semiconductor/solid-state device manufacturing, lighting devices, etc., and can solve problems such as difficult to reliably form scribing lines, inability to obtain separation surfaces, and difficulty in supporting glass substrates 2, etc.

Inactive Publication Date: 2004-07-28
MITSUBOSHI DIAMOND IND CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0020] Alternatively, if the scribe line is formed on the opposite surface of the glass substrate 2 provided with the sealing cover 9, it is difficult to stably support the glass substrate 2 because the sealing cover 9 rises to a certain height from the glass substrate 2.
Therefore it is difficult to reliably form the scribe line
And, because there is the cured adhesive on the contact surface of the sealing cover 9, wherein the contact surface is in contact with the opposite side surface of the glass substrate 2 where the scribe line is formed, the separation (fracture) direction of the glass substrate 2 is in line with the direction marked by the scribe line. The direction is not necessarily the same, therefore, the ideal separation surface cannot be obtained due to the influence of the adhesive

Method used

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  • Production device and production method for organic EL dispaly
  • Production device and production method for organic EL dispaly
  • Production device and production method for organic EL dispaly

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Embodiment Construction

[0035] Hereinafter, an organic EL display manufacturing apparatus according to the present invention will be described with reference to the accompanying drawings.

[0036] figure 1 A general structure of an organic EL display manufacturing apparatus 100 according to the present invention is shown. Manufactured organic EL displays with Figure 6 The structure shown is the same.

[0037] The organic EL display manufacturing apparatus 100 has: a thin film forming chamber 11 in which a thin film forming step is performed to form several layers on a glass substrate (brittle substrate) 2, such as an organic light emitting layer 5 and the like; and a sealed chamber 20 in which After the layered structure is formed on the glass substrate 2 , a sealing cover 9 is provided on the glass substrate 2 . The thin film forming chamber 11 and the sealing chamber 20 are connected to each other by a connecting passage 13 .

[0038] The film forming chamber 11 has a conveyance chamber 110, a...

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Abstract

A scribe line (S) is formed, for each area that is a potential organic EL display, on a glass substrate (2) prior to attaching a sealing cap (9). This can prevent the contact between a sealing cap (9) and a glass cutter (21) that poses a problem when a scribe line (S) is formed on a glass substrate (2) after a sealing cap (9) is set, and at the same time can eliminate a faulty segmentation by the effect of a residual stress caused by a pasted sealing cap (9).

Description

technical field [0001] The present invention relates to an organic EL display manufacturing apparatus and an organic EL display manufacturing method for manufacturing an organic EL display having a structure in which an organic luminescent layer formed on a glass substrate is sealed by a sealing cover. Background technique [0002] Organic EL (Electro Luminescence) displays have many advantages over liquid crystal displays, which are the current mainstream products of flat panel displays, and are attracting increasing attention as next-generation flat panel displays expected to replace liquid crystal displays in the future. [0003] Figure 6 is a perspective view showing the general structure of a typical organic EL display. [0004] The organic EL display 1 has a transparent glass substrate 2 . On a glass substrate 2, a plurality of positive electrode layers 3 are formed of a transparent conductive material such as ITO or the like in stripes at pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/32H01L51/52H01L51/56
CPCH01L51/56H01L27/3241H01L51/5237H10K59/10H10K71/851H10K71/00H10K59/871H10K71/40H05B33/10
Inventor 若山治雄
Owner MITSUBOSHI DIAMOND IND CO LTD
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