Llamping device and vertical direction driving positioner with inclination function

Abstract

The object of the present invention is to provide a clamp device that is free of positional deviation for acceleration in horizontal direction or downward direction, while performing translation and tilt operation along the vertical direction. The solution of the present invention is three sets of combination of ball (13-15) placed on support components (107-109), and clamp shafts (16-18) having a lower portion forming bearing portions (16-1 to 18-1) for the balls with the bearing portions urging upper portions of the balls. The clamp shaft includes: the bearing portions, and shafts (16-2 to 18-2) extending from the top. On the support component side, a frame (104-106) for keeping the combination of the balls and the clamp shafts in a state of extending upwards in rockable manner is provided, and belleville springs (101-103) are provided between the bearing portions and the frames for urging the bearing portions downwards.

Description

Technical field [0001] The invention relates to a vertical direction drive positioning device with tilt function, which has a drive function in a vertical direction, that is, a Z-axis direction, and a tilt angle, that is, a tilt function. Background technique [0002] The previously proposed Z-axis (vertical) drive device used as a positioning stage, etc., is a combination of three drive mechanisms to make the supported body supported by us, such as a table or a suction cup, move up and down in a horizontal direction. (E.g. Patent Document 1). [0003] Although it uses a kinematic fixture (the so-called Kinematic fixture), it is a device for positioning. Under the action of a horizontal acceleration or downward acceleration above a certain value, the upper object may deviate. . [0004] Below, refer to Figure 4 ~ Figure 6 To illustrate the device. [0005] (1) such as Figure 4 As shown in (a), the structure of the opener fen (ケルビン) clamp is that three balls 22, 23, 24 are mount...

AI Technical Summary

Problems solved by technology

However, when the three sets of Z axes are installed on the horizontal positioning table (X-Y table), due to the reason described in (3) above, when the horizontal positioning table is moved with a large acceleration , the upper part will shift

When connecting the upper and lower sides with a spring or the like to prevent this offset, the load of this part will be added to the Z-axis drive mechanism, which will inevitably increase the capacity of the Z-axis drive mechanism.

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