Thermal driven mini-type actuator

A micro-actuator and heat-driven technology, which is applied in the direction of microstructure technology, microstructure devices, and manufacturing microstructure devices, can solve the problems of killing cells and limiting cell operation, and achieves a structure that is not easy to break and has a low Young's modulus. Effect

Inactive Publication Date: 2005-11-02
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the application of MEMS microactuators for cell manipulation in the prior art, it is limited due to constraints such as displacement, force output, and working environment, that is, water will be electrolyzed when the potential on the holder reaches above 2V, so It is not suitable for use in liquid environments; currently, micro-magnetic actuators still require an independent magnetic source to drive; on the other hand, although thermal actuators can generate large forces and displacements, they will affect the temperature of the surrounding environment. Existing The thermal actuators require a working voltage up to several volts, and the working temperature is about 260°C, such a high temperature will kill the cells, so it is greatly limited in the actual cell operation

Method used

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Embodiment 1

[0031] Such as figure 1 As shown, the thermally driven micro-actuator of the present invention has the effect of electrothermal braking, and can be designed and processed to have multiple cantilever beam structures (fingers) to complete micro-operations such as cell capture and clamping. Each cantilever beam is installed on a silicon substrate and has a three-layer structure. Titanium and platinum are used as resistance heating materials, and titanium and platinum are placed between parylene C (a polymer material); that is, titanium and platinum are clamped by parylene C. The three-story structure constitutes a cantilever beam. This embodiment is 4 cantilevers (or fingers), see Figure 4 .

[0032] Among them: the resistance heating material can be a few-shaped structure or any shape (see figure 2 , 3 ).

[0033] The maximum working temperature of the thermally driven micro-actuator cantilever beam of the present invention is 70°C, and the voltage when it is fully bent i...

Embodiment 2

[0047] This embodiment is 2 cantilevers (or fingers, see Figure 8 ). Its processing technology differs from embodiment 1 in that:

[0048] Use 6100 Å light conditions to grow silicon oxide on the silicon chip as the substrate 1; apply a photoresist with a thickness of 1.0 μm on the desired part of the silicon substrate; the thickness of parylene C as the first layer 3 is 0.25; the resistance material titanium The thickness is 550 Å, and the platinum thickness is 1950 Å.

Embodiment 3

[0050] The present embodiment is 6 cantilever beams, and its processing technology differs from embodiment 1 in that:

[0051] On the silicon chip, use 5900 Å light conditions to grow silicon oxide as the substrate 1; apply a photoresist with a thickness of 1.8 μm on the required part of the silicon substrate; the thickness of parylene C as the first layer 3 is 0.35; the resistance material titanium The thickness is 450 Å, and the platinum thickness is 2050 Å.

[0052] The two usage states of the six-finger gripper in this embodiment are as follows: Figure 7-1 , 7-2shown. The index of the present invention should be determined according to the actual application.

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Abstract

The present invention relates to the application of miniature robot technology in cell operation and separation, and is especially one new kind of thermally driven miniature executor based on Parylene C polymer material and capable of realizing cell operation in liquid environment. The miniature executor has multiple cantilever beam structure fixed on silicon substrate, and each of the cantilever beams is a three layer structure with Parylene C sandwiched resistive material. The miniature executor is prepared through one MEMS planar printing process. The present invention has electrothermal braking effect, and Parylene C as one kind of thermally, electrically and chemically isolating material may keep the heater of resistive material from exposing in liquid, resulting in excellent biocompatibility and environmental suitability. The present invention realizes cell operation and separation under controlled temperature and may be used in automatic cell location, detection, injection and measurement.

Description

technical field [0001] The present invention relates to the application technology of micro-robot technology in cell operation and separation, specifically a novel heat-driven micro-actuator based on Parylene (a polymer material) that can realize cell operation in a liquid environment through heat-driven mode. Background technique [0002] The potential application of microrobotics in cell manipulation and isolation has attracted increasing attention. Biologists often use pipettes to separate cells before injecting DNA or nutrients into them. However, this method is limited by the size of the cells, e.g. if the cells are too small compared to the inner diameter of the pipette, a clump of cells can be inadvertently sucked into the pipette. Also, the pipette cannot be used to spin the cells, which is necessary during cell injection. [0003] In the application of MEMS microactuators for cell manipulation in the prior art, it is limited due to constraints such as displacement...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00
Inventor 李文荣陈浩然
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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