The invention discloses a flexible
retina emboss micro-
electrode chip in the technical field of a micro-electronic-mechanical-
system and a manufacture method thereof. In the method,
parylene C is used as a flexible substrate and an insulating material for preparing a micro-
electrode array which is formed by the arrangement of a plurality of micro-
electrode sensing elements; simultaneously, an electrode lead and a lead
welding point are manufactured to form the flexible
retina emboss micro-electrode
chip which is planted into the
retina part of a
human eye, can realize the safe and effective contact with the
neuron of the retina, effectively reduce the stimulation to a
pulse current, reduce the inserting damage to a
biological tissue caused by the planting of the micro-electrode and can improve the effect of electric simulating and neural
signal recording, thereby better recovering the
visual function. In the invention, the
parylene C is used as the substrate of a flexible electrode; the excellent electric insulating performance and mechanical performance thereof can improve the
biocompatibility of the micro-electrode
chip to a larger extent and have good stability for a long period. In the invention, an MEMS technique is adopted, thus realizing the integration of a functional unit and the flexible substrate of the micro-electrode.