Diaphragm resonant gas sensor and detection system based on parylene

Abstract

The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a membrane resonant gas sensor and a detection system based on polychlorop-xylene. The gas sensor adopts the structure of F-P interferometer, and the F-P cavity of the F-P interferometer is also the non-resonant photoacoustic cell of the photoacoustic system. Parylene-C has a low Young's modulus and a large elongation at break. The Parylene-C film prepared by vacuum vapor-phase polymerization deposition has the characteristics of strong conformality and good deposition uniformity. Therefore, vacuum vapor-phase polymerization is used. The Parylene-C film prepared by the deposition method can simultaneously have the characteristics of large radius and thin thickness. The natural resonance frequency of the F-P interferometer is proportional to the thickness of the diaphragm and inversely proportional to the square of the diaphragm radius, so the resonance frequency of the F-P interferometer can be as low as tens of Hz. The invention provides a new technical means for high-sensitivity long-distance gas telemetry in a narrow space.

Description

Technical field [0001] The present invention belongs to the field of fiber sensing and micro gas detection technology, and is relates to a diaphragm resonance gas sensor and detection system based on polychloro-based xylene. Background technique [0002] Trace gas detection has a wide range of application needs in the field of atmospheric environmental testing, industrial process control, and life science. With the development of laser technology, spectral techniques have become a gas detection method with high sensitivity, fast response time and high selectivity. Photonic acoustic spectroscopy detection technology is a direct measuring substance to generate thermal energy heat energy due to absorbing light energy. In the sealed photosensitive cell, the gas molecule is excited to high energy state due to the absorption of light of the specific wavelength, and the mutual collision between the high energy molecules causes the partially excited germplane to return the radiation tran...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to propose a diaphragm resonance miniaturized gas sensor and detection system based on polychlorop-xylylene, aiming to solve the problem that the traditional photoacoustic spectroscopy gas detection system cannot simultaneously realize long-distance telemetry and high-sensitivity detection , which expands a larger space for the application of photoacoustic spectroscopy detection technology in the field of long-distance telemetry of trace gases

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