Diaphragm resonant gas sensor and detection system based on parylene

A technology of gas detection system and gas sensor, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems that long-distance telemetry and high-sensitivity detection cannot be realized at the same time, and achieve the effect of reducing volume and simplifying structure

Active Publication Date: 2021-08-10
DALIAN UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to propose a diaphragm resonance miniaturized gas sensor and detection system based on polychlorop-xylylene, aiming to solve the problem that the traditional photoacoustic spectroscopy gas detection system cannot simultaneously realize long-distance telemetry and high-sensitivity detection , which expands a larger space for the application of photoacoustic spectroscopy detection technology in the field of long-distance telemetry of trace gases

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  • Diaphragm resonant gas sensor and detection system based on parylene
  • Diaphragm resonant gas sensor and detection system based on parylene
  • Diaphragm resonant gas sensor and detection system based on parylene

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Embodiment Construction

[0015] The specific embodiments of the present invention will be further described below with reference to the drawings and technical solutions.

[0016] The present invention provides figure 1 The Parylene-C-C-C-C-based diaphragm resonance gas sensor includes a single mode fiber 1, a F-P chamber 2, a Parylene-C film 3, a vent hole 4, and a housing 5. The F-P chamber 2 is both a cavity of the F-P interferometer, and is also a miniature non-resonant photocoyat cell for generating a photonic sound signal. The gas to be tested into the F-P chamber 2 through the vent hole 4, due to the photonic acoustic signal generated by the photoacoustic effect of the gas causes periodic vibration of the Parylene-C film 3. The Parylene-C film 3 has a diameter of 9 mm and a thickness of 800 nm, and the resonance frequency of the F-P interferometer is about 30 Hz at this time.

[0017] figure 2 A schematic diagram showing a detection system based on this diaphragm resonance gas sensor. The laser lig...

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Abstract

The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a membrane resonant gas sensor and a detection system based on polychlorop-xylene. The gas sensor adopts the structure of F-P interferometer, and the F-P cavity of the F-P interferometer is also the non-resonant photoacoustic cell of the photoacoustic system. Parylene-C has a low Young's modulus and a large elongation at break. The Parylene-C film prepared by vacuum vapor-phase polymerization deposition has the characteristics of strong conformality and good deposition uniformity. Therefore, vacuum vapor-phase polymerization is used. The Parylene-C film prepared by the deposition method can simultaneously have the characteristics of large radius and thin thickness. The natural resonance frequency of the F-P interferometer is proportional to the thickness of the diaphragm and inversely proportional to the square of the diaphragm radius, so the resonance frequency of the F-P interferometer can be as low as tens of Hz. The invention provides a new technical means for high-sensitivity long-distance gas telemetry in a narrow space.

Description

Technical field [0001] The present invention belongs to the field of fiber sensing and micro gas detection technology, and is relates to a diaphragm resonance gas sensor and detection system based on polychloro-based xylene. Background technique [0002] Trace gas detection has a wide range of application needs in the field of atmospheric environmental testing, industrial process control, and life science. With the development of laser technology, spectral techniques have become a gas detection method with high sensitivity, fast response time and high selectivity. Photonic acoustic spectroscopy detection technology is a direct measuring substance to generate thermal energy heat energy due to absorbing light energy. In the sealed photosensitive cell, the gas molecule is excited to high energy state due to the absorption of light of the specific wavelength, and the mutual collision between the high energy molecules causes the partially excited germplane to return the radiation tran...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/17G01N21/01
CPCG01N21/01G01N21/1702G01N2021/1704
Inventor 宫振峰陈烨伟高田力于清旭
Owner DALIAN UNIV OF TECH
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