Multi-channel micro-ring sensor and preparation and use method thereof

Abstract

The invention discloses a multi-channel micro-ring sensor and a preparation and use method thereof, the multi-channel micro-ring sensor comprises a sensing substrate, a waveguide micro-ring, a coating exposed sensing area and an optical fiber array, the waveguide micro-ring is manufactured on the sensing substrate by adopting a standard tape-out process, and the waveguide micro-ring comprises an input waveguide, two output waveguides and a micro-ring; according to the present invention, the multi-parameter detection purpose which can only be achieved through the traditional micro-fluidic channel is improved to the combination of the parylene C film hydrophobic effect and the microspotting instrument, such that the specific protein is fixed on the micro-ring surface through the one-step method so as to simplify the chip preparation and modification process, and the traditional micro-fluidic channel is adopted such that the size of the chip cannot be too small. The method does not depend on a microfluidic channel, the size of the chip is reduced, the higher integration level is achieved, meanwhile, the parylene C thin film one-step method is used for fixing the specific antibody, after detection is completed, parylene C can be removed, the chip is recycled, and the cost is reduced.

Description

technical field [0001] The invention relates to the technical fields of semiconductor devices, micro-nano processing and biosensing, in particular to a multi-channel micro-ring sensor and its preparation and use methods. Background technique [0002] Biosensors are a class of devices that can detect biological signals and are widely used in biomedicine, health care, environmental monitoring, drug detection, national defense security, pesticide residues, etc. The advantages of integration have attracted the attention of researchers. Among them, the microring biosensor is an optical sensing device based on the coupling theory of light, which has the advantages of small size, high sensitivity, easy portability, easy integration, and compatibility with CMOS technology; [0003] The micro-ring sensor has the advantages of high sensitivity and high integration. The micro-ring structure is made by the tape-out process, including the electron beam exposure process. Many micro-ring s...

AI Technical Summary

Problems solved by technology

[0003] The micro-ring sensor has the advantages of high sensitivity and high integration. The micro-ring structure is made by the tape-out process, including the electron beam exposure process. Many micro-ring structures are integrated on a chip of a few millimeters. When used in blood, urine and other body fluids When sensing and detecting multiple biomarkers, the application of microring devices is limited. The reason is that the common way to achieve multi-channel detection in sensors is to integrate with microfluidic chips. The structure of microfluidic chips ranges from tens of microns to The difference in size between hundreds of microns makes it difficult to effectively integrate highly integrated microring structures and microfluidic chips;

[0004] The microring sensor realizes the input and output of optical signals relying on optical fiber coupling, that is, the light wave is coupled into the waveguide by the optical fiber, and then coupled to the output optical fiber by the output waveguide. The coupling between the waveg

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