81 results about "Electrothermal actuator" patented technology

A mechanical self-reciprocating oscillator and mechanism and method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components are provided. The fully mechanical micromachined oscillator and mechanism are driven using only a DC power source on at least one substrate such as a semiconductor chip. The oscillator and mechanism preferably include an electrothermal actuator, that, when actuated, opens a switch to cut off supply current to the actuator. Two versions of the oscillator and mechanism are provided using distinct hysteresis mechanisms, one structural and the other thermal.

An electrothermal actuator includes at least two operating portions and at least two electrodes. The at least two operating portions are electrically connected with each other to define at least one conductive path. Each of the at least two operating portions comprises a flexible polymer layer and a carbon nanotube paper. A thickness ratio of the carbon nanotube paper and the flexible polymer layer ranges from 1:7 to 1:10. A density of the carbon nanotube paper is greater than or equal to 0.5 g / cm3. A thermal expansion coefficient of the carbon nanotube paper is greater than or equal to ten times that of the flexible polymer layer. A conductivity of the carbon nanotube paper along a current direction of the at least two operating portions is in a range from about 1000 S / m to about 6000 S / m.

The invention relates to a pump-control electro-hydraulic actuator, which comprises a position controller which is connected with a position sensor, the position sensor is connected with an expose head cylinder, two cavities of the expose head cylinder are respectively connected with the two ends of a hydraulic lock through a pipeline, the two ends of the hydraulic lock are connected with a two-way pump, a left relief valve, a right relief valve and a single valve, the other end of the check valves is connected and is connected with a fuel filter which is arranged in the oil box, the left relief valve and the right relief valve are connected with the oil box through the pipeline, an air filter and a liquid level thermometer are respectively arranged on the top portion and the side surface of the oil box, a distal control room is connected with a motor control unit through a wire, the two-way pump is connected with a motor, and the motor is connected with the motor control unit. The pump-control electro-hydraulic actuator leads the control room to adjust the motor control unit and adjust the rotating speed of the motor through a signal which is feedback to the position controller by a signal sensor, thereby adjusting the rotating speed of the two-way pump, achieving the changing of the two cavities of a hydro cylinder, and achieving the purpose of adjusting position. The pump-control electro-hydraulic actuator has low energy consumption, small volume, low cost and excellent control effect.

The invention discloses an intelligent ground heating system. A heating heat source is connected with a heating main water supply pipe and a heating main water return pipe; the heating main water supply pipe is connected with a water distributor through a threaded connection union of the heating main water supply pipe; the water distributor is connected with a flow regulating valve, an automatic exhaust and drain valve, a support and a ground heating pipe, the ground heating pipe is connected with a water collector through a water return compression joint of the ground heating pipe, the water collector connected with an electrothermal actuator, the automatic exhaust and drain valve, the support and the heating main water return pipe, the electrothermal actuator is connected with a temperature control wire, the temperature control wire is connected with a temperature controller, the temperature controller is connected with an external power supply, the heating main water supply pipe is connected with the heating main water return pipe, and the ground heating pipe is connected with a fine stone concrete covering layer and a corrugated sleeve. The intelligent ground heating system has a simple structure and convenient use, the energy can be effectively saved by more than 50 percent, each room is controlled independently, the system is stable and reliable, and the service life is long. The intelligent ground heating system can be enabled to be used for more than 50 years. Furthermore, the intelligent ground heating system has cleanness, sanitation and wide and flexible selection of heat sources.

An electrothermal actuator producing linear and / or rotational movement includes a housing having a longitudinal axis. A chamber within the housing contains a working fluid that changes phase upon heating. A piston is slidably disposed within the housing and movable along the longitudinal axis between first and second positions. A spring biases the piston toward the first position. The piston slides from the first position to the second position in response to heating of the working fluid. The piston includes a piston rod extending along the longitudinal axis and protruding from the housing. The housing includes helical grooves on an interior surface and the piston includes partially spherical recesses. Balls captured between the grooves and recesses produce rotation of the piston and piston rod when the piston moves between the first and second positions.

The invention discloses an electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth. The electro-thermal-driven micro-electro-mechanical comb tooth mechanism comprises a left-shift electrothermal actuator, a right-shift electrothermal actuator, a fixed tooth, a moving tooth, four first anchor regions and an insulating substrate, wherein the fixed tooth consists of a left-shift fixed tooth and a right-shift fixed tooth; the left-shift electrothermal actuator is connected with one end of the left-shift fixed tooth, and the two ends of the left-shift fixed tooth are respectively connected to the first anchor regions; the right-shift electrothermal actuator is connected with one end of the right-shift fixed tooth, and the two ends of the right-shift fixed tooth are respectively connected to the first anchor regions; the left-shift fixed tooth comprises a first wide beam, a left-shift comb tooth and four first folding beams; the right-shift fixed tooth comprises a first wide beam, a right-shift comb tooth and four second folding beams; the moving tooth comprises a quality block, a moving tooth comb tooth, two second anchor regions and two third folding beams; and a left-shift stop block is arranged on the first wide beam, and a right-shift stop block is arranged on the second wide beam. Under the driving of an electrothermal driving force, the micro-electro-mechanical comb tooth mechanism regulates the intervals of the teeth to enable a signal generated by micro-electro-mechanical vibration to be strong.

An electrothermal actuator includes at least one connecting portion; at least two operating portions; and at least two electrodes. Each of the at least one connecting portion and the at least two operating portions includes a flexible polymer layer and a carbon nanotube paper. A thickness ratio of the carbon nanotube paper and the flexible polymer layer ranges from 1:7 to 1:10. A density of the carbon nanotube paper is greater than 0.5 g / cm3. A thermal expansion coefficient of the carbon nanotube paper is greater than ten times that of the flexible polymer layer. A conductivity of the at least two operating portions along the current direction ranges from 1000 S / m to 6000 S / m. A conductivity of the at least one connecting portion along the current direction is greater than 6000 S / m.

The invention discloses a radiating and air conditioning cold-heat integrated system, wherein a master controller is electrically connected with a central controller; the central controller controls cold and heat sources in a linked way; the central controller and end controllers in every area form a network self control system; the central controller is electrically connected with an electrical actuator; the electrical actuator controls a one-stage water distributing and collecting device; the one-stage water distributing and collecting device is connected with the cold and heat sources through a pipeline and connected with flowrate balance valves and confluent electric control valves in every independent area; the confluent electric control valves decide the flow direction and the starting / stopping of cold or hot water medium through the control signals of the end controllers, control the fan coil to cool or heat in air circulating convection, and control the radiating cold-heat end to cool or heat in a radiating way through the second-stage water distributing and collecting device with the function of water intake / return closing or opening adjustment. The radiating and air conditioning cold-heat integrated system not only retains the advantage of the air conditioner that the temperature adjusting speed is high, but also retains the advantages of radiating energy conservation, comfortable temperature, environmental protection and being favorable for human health.

The invention relates to an electric heating type flow intelligent adjusting valve and a control method thereof and belongs to the field of automatic control technologies. The electric heating type flow intelligent adjusting valve comprises an electric heating actuator, a control device and a valve, wherein the electric heating actuator comprises a paraffin driver, an ejector rod, a fixed nut, a power supply wire, a position fixing spring, a force transmission spring, a moving sheet, a plastic shell and a device shell; the control device comprises a temperature sensor, a control circuit, a control panel and a signal wire; the valve comprises a valve rod, a returning spring, a fixed valve seat, an inlet cavity and an outlet cavity; the control method comprises the steps of detecting temperature of the paraffin driver through the temperature sensor, receiving a temperature signal through the control device and adjusting the temperature of the paraffin driver according to a travel model calculation and control strategy of the ejector rod of the paraffin driver so as to control the travel of the ejector rod and realize flow adjustment of a fluid medium. The electric heating type flow intelligent adjusting valve is compact in structure, long in service life, low in energy consumption, low in production cost and convenient to mount and maintain.

The invention provides an intelligent temperature control water-mixing center which is installed at the position of the front end of a water distributor and a water collector or the water supply or water return position of a wall-hanging stove, hot water generated by the wall-hanging stove flows into a water inlet hole at the bottom of a water-mixing valve core from a water supply port through a heat supply pipeline, enters a shielded circulating pump through a first circulating pump port, flows to a water supply three-way connecting assembly through a second circulating pump port, enters a water distributor main pipe through a mixed water supply port to reach a water collector main pipe through a floor heating pipe, flows into a primary water return port, finally flows out through the primary water return port and returns to the wall-hanging stove through a return water pipeline, and a circulation loop is formed. A single water-mixing valve can replace a matching product composed of a plurality of unifunctional valve parts, is safe and reliable and reduces manufacturing cost. PLC programming is set in a temperature control panel to control the temperature of the mixed water according to time periods, the energy consumption is reduced to the largest extent, and energy is saved; the temperature control panel can control and command an electric heating executor and the circulating pumps to operate; an adjusting hand wheel can be arranged, and manual operation can be performed under special conditions such as outage.

A method for making an electrothermal actuator requires a carbon nanotube paper being provided. The carbon nanotube paper is cut along a cutting-line to form a patterned carbon nanotube paper. At least two electrodes are formed on the patterned carbon nanotube paper. Finally, the electrothermal actuator is obtained by forming a flexible polymer layer on the patterned carbon nanotube paper.

The invention discloses a nanowire huge piezoresistive characteristic measuring device and a manufacturing method thereof. The nanowire huge piezoresistive characteristic measuring device comprises a nanowire, a platinum resistor temperature sensor, an electrothermal actuator, a displacement sensor based on capacitance measurement, electrodes and a load sensor based on capacitance measurement. The platinum resistor temperature sensor, the electrothermal actuator, the displacement sensor based on capacitance measurement and the load sensor based on capacitance measurement are connected in sequence. The number of the electrodes is four. The four electrodes are arranged between the displacement sensor based on capacitance measurement and the load sensor based on capacitance measurement. The nanowire is arranged between two horizontally-arranged electrodes. By adopting the nanowire huge piezoresistive characteristic measuring device and the manufacturing method thereof, machinery characteristics and electrical characteristics of the nanowire are measured simultaneously, and the representation of a piezoresistive coefficient is realized; in addition, the nanowire huge piezoresistive characteristic measuring device is applicable to different kinds of measurement samples.

The disclosed embodiments combine an electrothermal actuator system with an electrostatic attraction system, in order to orient bistable micromirrors in digital micromirror devices (DMDs). The micromirror, pivotally supported, can switch between two orientations. While typical DMD systems use electrostatic electrodes to orient the micromirror, stiction forces can restrict micromirror motion, affecting optical performance. The disclosed embodiments use an electrothermal actuation system to mechanically assist the electrodes, overcoming stiction without the need for a high-voltage reset pulse.

An electrothermal composite material includes a flexible polymer layer and a carbon nanotube paper stacked on the flexible polymer layer. The carbon nanotube paper is at least partly embedded into the flexible polymer layer. A thickness ratio of the carbon nanotube paper and the flexible polymer layer is in a range from about 1:7 to about 1:10. A density of the carbon nanotube paper is greater than or equal to 0.5 g / cm3. A thermal expansion coefficient of the carbon nanotube paper is greater than or equal to ten times that of the flexible polymer layer. A conductivity of the carbon nanotube paper along a first direction is in a range from about 1000 S / m to about 6000 S / m. An electrothermal actuator is also provided.

A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

The invention relates to a dynamic balance dual-source time on-off area heat metering system and method. The system comprises a client and a management terminal, wherein the client comprises an adjustable flow balance valve mounted on a heat supply pipeline, an electric heat executor for controlling the opening and closing of the adjustable flow balance valve, an IC (integrated circuit) card typeheat metering temperature controller connected with the electric heat executor to control the temperature, and an user recharging IC card for recharging the IC card type heat metering temperature controller; the management terminal comprises a recharging machine and a computer. The system provided by the invention can guarantee the same final heating effect for all households on the basis of guaranteeing the water balance; the flow rate of each household is preset so that the heat metering can be performed in a way that the user can consume heat according to the time after prepaying.

A bi-directional driving micro-electro-mechanical system (MEMS) security device comprises a cover plate layer and a security device layer which are stuck by applying glue, after assembly, transverse heat insulation grooves of the cover plate layer and transverse heat insulation cavities of the security device layer are located on the two sides of a transverse V-shaped electric heating actuator ofthe security device layer separately, a silicon separation plate of the security device layer is located in a slideway observation window of the cover plate layer, and a silicon through hole and a silicon acceleration boring through hole of the security device layer are laid coaxially. The overall structure of the security device layer is of axial symmetry layout, a movable separation plate is arranged in the center of the security device layer and disposed in a limiting slideway, the two ends of the movable separation plate are connected with the security device layer through a T-shaped beam,and four sets of driving units are symmetrically arranged around the movable separation plate. After fabrication is completed, the T-shaped beam is broken by external force, and the movable separation plate is limited only by the driving units. The silicon separation plate is driven in dual directions, mutual conversion of working states of the bi-directional driving MEMS security device is realized, and the bi-directional driving MEMS security device has the characteristics of high strength, overload resistance, large displacement output, structure self-locking and the like.

The invention relates to an electrothermal drive outer rotor stepping micro-motor, which comprises electrothermal actuators and a ring wheel rotor. The electrothermal actuators are flexible cold and hot arm electrothermal actuators and can make arc-shaped reciprocating motion. The rotor is a ring wheel and is supported on a substrate through anti-sticking bumps. The direction of the rotor in perpendicular to the substrate is constrained by constraint covers. Ratchets are arranged on the inner wall of the rotor. Gear teeth are arranged on the outer wall of the rotor. The micro-motor is driven by the electrothermal actuators and has the characteristics of large output torque, low rotating speed, small operating voltage, IC (integrated circuit) voltage compatibility and adjustable rotating speed. Since the micro-motor is fabricated by adopting the MEMS (micro-electromechanical system) surface silicon technology, the micro-motor is not required to be assembled, the structure is simple and the micro-motor can be used in the fields of medical treatment, military, aerospace, biomedicine and the like.

The invention relates to an applied technology of micro-robots in the fields of cell operation and cell separation, in particular to a micro-actuator driven by heating from electricity and a process for preparation. The micro-actuator driven by heating from electricity is composed of a polymeric material of Parylene C and electron-heating materials of titanium and platinum and is capable of realizing the operation of clamping cells under the fluid environment. The actuator is a multiple cantilever beam structure and is fixed on a silicon substrate, and each cantilever beam is a three-layer structure of parylene C clamping the electron-heating materials. The processing technique employs screen-printing technology of MEMS (micro-electro-mechanism system). The invention is capable of being electrically driven, and parylene C is taken as heat / electricity / fluid isolation material, then a heater formed by electron-heating materials is not exposed in the fluid, thereby having good biological adaptability and fluid environment adaptability, being capable of realizing cell operation and cell separation by controlling the temperature and providing automatic operation and application of localization detection, injection and measuring of cells.

An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

The invention discloses a wireless radio frequency communication-based water underfloor heating system. The wireless radio frequency communication-based water underfloor heating system comprises a central control box, a water collecting and dividing unit, electrothermal actuators, a temperature detector, a temperature controller and actuating elements, wherein the water collecting and dividing unit is connected with the actuating elements through the electrothermal actuators; a processor I and a wireless radio frequency transmitting device are arranged inside the temperature controller; the temperature detector is connected with the processor I; the processor I is connected with the wireless radio frequency transmitting device; a wireless radio frequency receiving device, a processor II and control terminals are arranged inside the central control box; the wireless radio frequency transmitting device is in wireless radio frequency communication with the wireless radio frequency receiving device; the wireless radio frequency receiving device is connected with the processor II; the processor II is connected with the control terminals; the control terminals are connected with the electrothermal actuators. The temperature controller is in wireless radio frequency communication with the central control box, so that the wireless radio frequency communication-based water underfloor heating system is easy to mount and convenient to maintain, and thus the laying cost and the later maintenance cost of the water underfloor heating system are greatly reduced.

A compact electrothermal actuator includes a housing having a longitudinal axis. A slot extends through the housing. A chamber within the housing contains a working fluid that changes phase upon heating. A piston is slidably disposed within the housing and movable along the longitudinal axis between first and second positions. A spring biases the piston toward the first position. The piston slides from the first position to the second position in response to heating of the working fluid. The piston includes a guide pin extending transverse to the longitudinal axis and protruding into the slot. The slot may be linear or helical for sliding of the piston between the first and second positions without or with rotation of the piston. The length of the actuator, measured along the longitudinal axis, is constant, independent of the position of the piston within the housing.

A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

The invention relates to a high-resolution micrometer vernier scale structure for measuring the micro physical dimension variable quantity and (or) the movement amount of a micro electro mechanical system structure. The high-resolution micrometer vernier scale structure comprises a one-dimensional mobile measuring vernier scale body, a lever mechanism for amplifying the movement amount and a relative type electric heating actuator. The high-resolution micrometer vernier scale structure uses current to generate heat to drive a testing probe to move, uses the lever mechanism to improve flexibility and uses the special vernier scale body to measure and equalize the movement amount. By means of the lever amplifying factor design, the micrometer resolution can be effectively and simply improved.

The invention provides an electric heating actuator, which belongs to the technical field of mechanical engineering. The electric heating actuator solves the problems of complex structure and convenient use of the conventional electric heating actuator. The electric heating actuator comprises a fixed seat and a base which can be fixedly connected with a valve body, wherein a thermometer bulb and an electric heating element are fixed in the fixed seat; the electric heating element is connected with the body of the thermometer bulb; and the fixed seat is connected with the base through an elastic connecting mechanism which ensures that one end of the fixed seat always has a trend of moving towards a direction leaning against the base. The electric heating actuator has the advantages of reasonable and compact structure design, attractive appearance, stable performance and long service life, and is convenient and safe to use.

An electrothermal actuator includes at least two operating portions and at least two electrodes. The at least two operating portions are electrically connected with each other to define at least one conductive path. Each of the at least two operating portions comprises a flexible polymer layer and a carbon nanotube paper. A thickness ratio of the carbon nanotube paper and the flexible polymer layer ranges from 1:7 to 1:10. A density of the carbon nanotube paper is greater than or equal to 0.5 g / cm3. A thermal expansion coefficient of the carbon nanotube paper is greater than or equal to ten times that of the flexible polymer layer. A conductivity of the carbon nanotube paper along a current direction of the at least two operating portions is in a range from about 1000 S / m to about 6000 S / m.

The invention relates to an electrothermal actuator, and belongs to the field of actuation devices of temperature control devices. The waterproof electrothermal actuator comprises a paraffin temperature bulb. A small cylinder portion is arranged on the lower portion of the paraffin temperature bulb, a large cylinder portion is arranged on the upper portion of the paraffin temperature bulb, and a movable centre is further arranged on the top of the paraffin temperature bulb. A first lead wire of a wire is connected to a heating resistor at the bottom end of the small cylinder portion, and a second lead wire of the wire is connected to an electrode terminal at the lower end of the large cylinder portion. The waterproof electrothermal actuator further comprises a base. An annular groove which is matched with the paraffin temperature bulb is formed in the base, wherein an opening is formed in the upper portion of the annular groove. A gap is formed between the annular groove and the annular periphery of the paraffin temperature bulb, and is filled with sealing packing. According to the waterproof electrothermal actuator, due to the design of the base structure and the improvement of the sealing way, the water resistance performance of the electrothermal actuator can achieve the IPX 7 grade or the higher grade, and even the electrothermal actuator can normally work in the immersion state. Compared with the prior art, the waterproof electrothermal actuator has the advantages of being obvious in structural water resistance effect, safer and more reliable, guaranteeing the power utilization safety of the electrothermal actuator and having the high market promotion value.