Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth

Abstract

The invention discloses an electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth. The electro-thermal-driven micro-electro-mechanical comb tooth mechanism comprises a left-shift electrothermal actuator, a right-shift electrothermal actuator, a fixed tooth, a moving tooth, four first anchor regions and an insulating substrate, wherein the fixed tooth consists of a left-shift fixed tooth and a right-shift fixed tooth; the left-shift electrothermal actuator is connected with one end of the left-shift fixed tooth, and the two ends of the left-shift fixed tooth are respectively connected to the first anchor regions; the right-shift electrothermal actuator is connected with one end of the right-shift fixed tooth, and the two ends of the right-shift fixed tooth are respectively connected to the first anchor regions; the left-shift fixed tooth comprises a first wide beam, a left-shift comb tooth and four first folding beams; the right-shift fixed tooth comprises a first wide beam, a right-shift comb tooth and four second folding beams; the moving tooth comprises a quality block, a moving tooth comb tooth, two second anchor regions and two third folding beams; and a left-shift stop block is arranged on the first wide beam, and a right-shift stop block is arranged on the second wide beam. Under the driving of an electrothermal driving force, the micro-electro-mechanical comb tooth mechanism regulates the intervals of the teeth to enable a signal generated by micro-electro-mechanical vibration to be strong.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical system structure, and in particular relates to a micro-electro-mechanical comb tooth mechanism for adjusting tooth gaps by electrothermal driving. Background technique [0002] Comb structures are widely used in MEMS, for example, resonators, accelerometers, angular velocity meters, gyroscopes, etc. The traditional comb structure consists of paired fixed teeth and movable teeth. The fixed teeth and movable teeth are arranged at intervals and usually have many pairs. In the traditional structure, the fixed teeth remain in a static state without longitudinal and lateral displacement, while the movable teeth usually move in the form of vibration under the action of external force, and the direction of motion is along the length of the teeth. [0003] Due to the limitation of machining accuracy, the gap between the fixed tooth and the movable tooth in the comb tooth structure cannot ...

AI Technical Summary

Problems solved by technology

Since the gap between the comb teeth of the traditional structure is immutable and cannot be made very small due to the limitation of the process, the sensing detection signal generated by the micro-electromechanical vibration is also very weak

[0004] Some researchers have proposed a comb structure with adjustable gaps on one side, but this structure has the following two main disadvantages: because the comb teeth are usually a multi-pair structure, the reduction of the gap on one side will inevitably lead to the increase of the gap on the other side, which is wasteful. The driving force on one side; because the gap between the two sides of the movable tooth is asymmetrical, the magnitude of the electrostatic force between the movable tooth and the fixed teeth on both sides is different, and the one-dimensional linear motion of the movable tooth will be affected, resulting in two-dimensional motion

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