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High-resolution micrometer vernier scale for micro electro mechanical system

A high-resolution vernier technology, applied in the field of high-resolution micro-electromechanical micro-vernier structure, can solve the problem of limited resolution and achieve the effect of simple structure

Inactive Publication Date: 2013-12-04
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, since the instruments used in online testing are mainly conventional equipment with limited resolution, it is a key technical issue to use the design of the test structure itself to achieve high-resolution measurement

Method used

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  • High-resolution micrometer vernier scale for micro electro mechanical system
  • High-resolution micrometer vernier scale for micro electro mechanical system
  • High-resolution micrometer vernier scale for micro electro mechanical system

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Embodiment Construction

[0025] The following description is merely exemplary in nature and not intended to limit the disclosure, application or use. It should be understood that throughout the drawings, corresponding reference numerals indicate like or corresponding parts and features.

[0026] Attached below Figure 1~3 The present invention will be further described.

[0027] attached by figure 1 It can be seen that the high-resolution micro-electromechanical micrometer vernier of the present invention is composed of a one-dimensional mobile measuring vernier, a lever mechanism for amplifying the amount of movement, and a relative electrothermal actuator. beam.

[0028] The one-dimensional mobile measuring vernier 102 is composed of left and right parts, wherein:

[0029] The left half of the one-dimensional mobile measuring vernier 102 includes a plurality of "T"-shaped structures with the same size and rotated 90 degrees clockwise. The "|" part (bottom) of the "T"-shaped structure is a horizo...

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Abstract

The invention relates to a high-resolution micrometer vernier scale structure for measuring the micro physical dimension variable quantity and (or) the movement amount of a micro electro mechanical system structure. The high-resolution micrometer vernier scale structure comprises a one-dimensional mobile measuring vernier scale body, a lever mechanism for amplifying the movement amount and a relative type electric heating actuator. The high-resolution micrometer vernier scale structure uses current to generate heat to drive a testing probe to move, uses the lever mechanism to improve flexibility and uses the special vernier scale body to measure and equalize the movement amount. By means of the lever amplifying factor design, the micrometer resolution can be effectively and simply improved.

Description

technical field [0001] The invention provides a high-resolution micro-electro-mechanical measuring micro-vernier structure for measuring the movement amount of the micro-electro-mechanical structure. It belongs to the technical field of microelectromechanical system (MEMS) testing. Background technique [0002] Normally, the movement of moving parts in microelectromechanical devices (MEMS) is very small. On the other hand, there are often residual stresses in MEMS materials. Due to the elongation or shortening of the structure due to the release of residual stress, the actual geometric size change value It is also very small. In addition, the small geometric size changes caused by the thermal expansion of materials also need to be measured. The measurement of these very small changes requires high resolution. How to accurately and sensitively realize the test target under the condition of online measurement is a practical technical problem. [0003] There are many ways to ...

Claims

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Application Information

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IPC IPC(8): G01B7/00G01B7/14B81B7/02
Inventor 李伟华王雷张晓强张璐周再发
Owner SOUTHEAST UNIV
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