Bi-directional driving micro-electro-mechanical system (MEMS) security device
A two-way drive, security technology, applied in the direction of weapon accessories, blasting barrels, offensive equipment, etc., can solve unsatisfactory problems, reduce processing difficulty, realize large-scale manufacturing, and improve the yield of finished products
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[0024] The present invention will be further described below in conjunction with the accompanying drawings.
[0025] refer to figure 1 , a two-way drive MEMS security device, including a cover layer 100 and a security device layer 200, the two are pasted together by glue; refer to figure 2 , after the assembly is completed, the lateral thermal insulation groove 102 of the cover layer 100 and the lateral thermal insulation chamber 222 of the security device layer 200 are respectively located on both sides of the lateral V-shaped electrothermal actuator 226 of the security device layer 200, and the silicon partition 230 of the security device layer 200 Located in the slide observation window 104 of the cover layer 100 , the TSVs 231 and the TSVs 232 of the security device layer 200 are arranged coaxially.
[0026] refer to image 3 , the overall structure of the cover layer 100 is an axisymmetric layout, including the slideway observation window 104, the slideway observation ...
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