Partition-type micro-electromechanical system (MEMS) fuze

A partition-type, fuze technology, applied in fuzes, weapon accessories, offensive equipment, etc., can solve problems such as breakthroughs and restrict technological development, and achieve the effect of improving yield, high degree of intelligence, and high degree of integration

Active Publication Date: 2016-03-02
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] With the advancement of weapon technology, fuzes need to develop in the direction of miniaturization, integration and intelligence, and it is difficult for traditional processing techniques to make breakthroughs in small-scale processing, which will restrict the development of related technologies

Method used

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  • Partition-type micro-electromechanical system (MEMS) fuze
  • Partition-type micro-electromechanical system (MEMS) fuze
  • Partition-type micro-electromechanical system (MEMS) fuze

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the accompanying drawings.

[0022] refer to figure 1 , a partition type MEMS fuze, including agent cover layer I, agent layer II, security device layer III and acceleration chamber layer IV, the upper part of agent layer II and agent cover layer I are connected by bonding, and the lower part of agent layer II It is connected with the upper part of the security device layer III by bonding, and the lower part of the security device layer III is pasted with the acceleration chamber layer IV.

[0023] refer to figure 2 , the drug cover layer I includes a drug cover 23, the drug cover 23 is a square sheet of single crystal silicon material with a side length of 7.5mm-8mm and a thickness of 0.2mm-0.3mm.

[0024] refer to image 3 , the drug layer II includes a drug layer wall 20, the drug chamber 22 is located below the center of the drug layer wall 20, and is used to fill the priming agent, the de...

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Abstract

A partition-type micro-electromechanical system (MEMS) fuze comprises a chemical layer. The upper portion of the chemical layer is connected with a chemical covering plate layer in a bonding mode. The lower portion of the chemical layer is connected with the upper portion of a security device layer in a bonding mode. The lower portion of the security device layer adheres to an acceleration chamber layer. The security device layer comprises a silicon substrate layer, and a silicon dioxide layer and a movable silicon structural layer are sequentially made on the silicon substrate layer. Four groups of drivers are made in the movable silicon layer. A left metal electrode and a right metal electrode of each group of drivers are made on a left anchoring point and a right anchoring point respectively. The two ends of V-type thermoelectric executors arranged in an array are connected with the left anchoring point and the right anchoring point respectively. The head end of each lever is connected with a middle arm through a right flexible beam. A lower anchoring point is connected with the head end of each lever through a left flexible beam. A partition plate is located at the tail end of each lever and provided with an interlocking groove and an interlocking tooth which achieve interlocking with the interlocking tooth and the interlocking groove of the corresponding adjacent partition plate. The MEMS technology is introduced to the fuze, and the partition-type MEMS fuze has the characteristics of being low in cost, high in intelligence and easy to integrate.

Description

technical field [0001] The invention relates to the technical field of fuzes, in particular to an isolated MEMS fuze. Background technique [0002] The fuze is an important part of the weapon system. It detects the environment and targets to obtain information, process and identify information, and realizes the safety state control and optimal detonation control of the fuze. In order to achieve the above goals, a corresponding partition mechanism is usually designed to prevent accidental detonation and improve the safety performance of the fuze. [0003] With the advancement of weapon technology, fuzes need to develop in the direction of miniaturization, integration, and intelligence. However, it is difficult for traditional processing techniques to make breakthroughs in small-scale processing, which will restrict the development of related technologies. Applying MEMS technology to the design of the fuze will solve this contradiction well. MEMS fuze has many advantages suc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F42C15/00
CPCF42C15/00
Inventor 赵玉龙胡腾江李秀源白颖伟
Owner XI AN JIAOTONG UNIV
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