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Fluid transfer pump

A liquid and suction port technology, which is applied in the field of pumps for liquid transportation, can solve the problem of easy retention of resist liquid and achieve good liquid replacement characteristics, low liquid retention rate, and excellent liquid replacement characteristics

Active Publication Date: 2006-08-02
TORAY ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, since the film-shaped sealing member 6 has a very narrow U-shaped turning portion 61, the resist liquid tends to stagnate therein.

Method used

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Embodiment Construction

[0022] The best mode for carrying out the present invention will be described below with reference to the drawings. 1 is a front partial cross-sectional view showing a pump 1 for liquid delivery according to the present invention. FIG. 1(A) shows a state where the plunger 5 is at the bottom dead center, and FIG. 1(B) shows the state where the plunger 5 is at the top dead center. figure 2 3 is a perspective view showing the appearance of the film-shaped sealing member 6, and FIG. 3 is a partial front sectional view showing the liquid transfer pump of the present invention.

[0023] In addition, the case where the liquid is a resist liquid will be described below as an example, but of course other liquids other than the resist liquid may also be used.

[0024] As shown in FIG. 1 , a liquid transfer pump 1 according to the present invention has a cylinder 2 , a plunger 5 and a membrane seal member 6 .

[0025] The cylinder 2 includes: a substantially bowl-shaped upper cover 3 h...

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Abstract

The present invention provides a liquid transfer pump of extremely low liquid stay rate and excellent in liquid exchange characteristics. The liquid transfer pump 1 comprises a cylinder 2 provided with the suction port 32 and the delivery port 33, a plunger 5 provided in the cylinder 2 reciprocatably in a direction along the axial line J1, and a film sealing member 6 sealing a gap G between the cylinder 2 and the plunger 5, and delivering transfer object liquid sucked from a suction port 32 from a delivery port 33 by reciprocating the plunger 5 performing suction action and delivery action, the suction port 32 is provided on a side surface of the cylinder 2.

Description

technical field [0001] The present invention relates to a pump for liquid delivery, which includes: a cylinder (cylinder), which has a suction port and a discharge port; and a film-shaped sealing member, which is used to seal the gap between the cylinder and the plunger, and the pump for liquid delivery alternately performs suction and discharge operations by reciprocatingly driving the plunger, so that the transportation sucked from the suction port The target liquid is spit out from the discharge port. In particular, the present invention relates to a pump suitable for conveying a liquid containing a precipitated substance, such as a resist liquid used in the manufacture of liquid crystal substrates and the like. Background technique [0002] Conventionally, as a device for supplying a resist liquid used in liquid crystal substrate production to a liquid crystal substrate production apparatus, such a liquid delivery pump is used, which includes: a cylinder having a suctio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B1/12
CPCF04B43/02F04B15/00F04B15/02F04B17/04
Inventor 上原淳一岩出卓
Owner TORAY ENG CO LTD
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