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Valve assembly for a cryopump

A technology of components and pipeline valves, applied in pumps, refrigeration and liquefaction, lighting and heating equipment, etc., capable of solving problems such as complex systems

Active Publication Date: 2012-11-21
EDWARDS VACUUM LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although regeneration can be controlled by manually switching the cryocooler and manually controlling the purge and roughing valves, separate regeneration controllers are used for more complex systems

Method used

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  • Valve assembly for a cryopump
  • Valve assembly for a cryopump
  • Valve assembly for a cryopump

Examples

Experimental program
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Effect test

Embodiment Construction

[0021] Preferred embodiments of the present invention are described below.

[0022] figure 1 is a diagram of a typical cryopump pumping system 100 in the prior art. In a physical representation of that system, the pneumatic roughing valve 155 and the roughing control valve 154 are integrated into a single component. The roughing valve assembly connects the cryopump unit 110 with the roughing vacuum pump 120 . A solenoid actuated rough vacuum control valve 154 controls high pressure air to bias a pneumatic rough vacuum valve 155 . In addition, a solenoid-actuated pump purge valve 152 is directly connected to the cryopump unit 110 and supplies purge gas 140 (usually high-pressure nitrogen). Typically, the high pressure gas 140 is dispensed through a distribution node 151 that also directs the high pressure gas through a solenoid driven exhaust and purge valve 156 . As the gas evaporates, the pressure in the cryopump increases and the gas is vented through the pressure relief...

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PUM

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Abstract

A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a reliefvalve port can connect the outer duct of the assembly to an exhaust stack.

Description

technical field [0001] This application is a continuation of US Patent Application Serial No. 10 / 804,842, filed March 19,2004. The entire teaching of the above application is hereby incorporated by reference. Background technique [0002] Currently available cryogenic vacuum pumps or cryopumps generally follow a common design philosophy. A cryogenic array, typically operating in the range of 4 to 25K, is the main pumping surface. This surface is surrounded by a warmer radiation shield, typically operating in the 60 to 130K temperature range, that provides radiation shielding for the cooler array. The radiation shield generally comprises a closed housing, except for the leading edge array to be evacuated between the main suction surface and the working chamber. [0003] In operation, high boiling point gases (eg, water vapor) condense on the leading edge array. The lower boiling gas passes through the array into the volume inside the radiation shield and condenses on the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D8/00F04B37/08
CPCF04B37/08
Inventor 阿伦·J·巴利特加里·S·阿什布赖恩·汤普森马克·A·斯蒂尔
Owner EDWARDS VACUUM LLC