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Fixed clamp for calibrating surface electrometer and calibration method

A technology for fixing fixtures and electrometers, which is used in electrostatic instruments, electrostatic field measurement, measurement of electrical variables, etc., to achieve low-cost, simple and cost-effective effects

Inactive Publication Date: 2007-04-25
RENESAS ELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, if 50 surface electrometers are used in the factory, and the calibration cost is about 50,000 yen per unit, the total consignment fee will be 2.5 million yen

Method used

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  • Fixed clamp for calibrating surface electrometer and calibration method
  • Fixed clamp for calibrating surface electrometer and calibration method
  • Fixed clamp for calibrating surface electrometer and calibration method

Examples

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Embodiment Construction

[0019] Hereinafter, preferred embodiments of the surface electrometer calibration jig and calibration method according to the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same reference numerals are assigned to the same elements, and overlapping descriptions are omitted.

[0020] FIG. 1 is a perspective view showing an embodiment of a fixing jig for calibration of a surface electrometer according to the present invention. The fixing jig 1 for correction has: an upper plate 2; a side plate 5a (the first side plate), which is connected to the side S1 (the first side) of the upper plate 2; a side plate 5b (the second side plate), which is connected to the upper plate 2 The side S2 (second side) opposite to the side S1 is provided in a row; and the opening 3 is provided on the upper plate 2 for inserting the detector part of the surface electrometer as the calibration object.

[0021] The upper ...

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PUM

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Abstract

The invention can calibrate a surface electrometer conveniently in the past. As a result, the user has to entrust the surface electrometer to a third department for calibrating, therefore generating a problem of entrustment cost. The fixed clamp (1) for calibrating comprises: an upper board (2); a side board (5a, the first side board) connecting with the side (S1, the first side) of the upper board (2); a side board (5b, the second side board) connecting with the side (S2, the second side) of the upper board (2) which faces the side (S1); and an opening (3) disposed on the upper board (2) for inserting a sensor of the surface electrometer which is calibrated as an object.

Description

technical field [0001] The invention relates to a fixing jig for calibration of a surface electrometer and a calibration method. Background technique [0002] In recent years, there has been an increasing demand for static electricity management in the front-end process of semiconductor manufacturing. Therefore, semiconductor factories introduce a large number of surface electrometers and conduct static electricity management. A method of measuring static electricity is described in Patent Document 1, for example. This document describes that the electrostatic charge amount of the object to be measured is measured while keeping the distance between the object to be measured and a measuring probe constant. [0003] In addition, Non-Patent Document 1 describes the electrostatic measurement principle of a surface electrometer. This document describes a measurement method called a feedback method or a zero point method. In this method, a displacement current is induced in th...

Claims

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Application Information

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IPC IPC(8): G01R35/00G01R5/28G01R29/12G01R29/24
Inventor 牛岛三男
Owner RENESAS ELECTRONICS CORP
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