Fixed clamp for calibrating surface electrometer and calibration method

A technology for fixing fixtures and electrometers, which is used in electrostatic instruments, electrostatic field measurement, measurement of electrical variables, etc., to achieve low-cost, simple and cost-effective effects

Inactive Publication Date: 2007-04-25
RENESAS ELECTRONICS CORP
View PDF2 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, if 50 surface electrometers are used in the factory, and the calibration

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fixed clamp for calibrating surface electrometer and calibration method
  • Fixed clamp for calibrating surface electrometer and calibration method
  • Fixed clamp for calibrating surface electrometer and calibration method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] Hereinafter, preferred embodiments of the surface electrometer calibration jig and calibration method according to the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same reference numerals are assigned to the same elements, and overlapping descriptions are omitted.

[0020] FIG. 1 is a perspective view showing an embodiment of a fixing jig for calibration of a surface electrometer according to the present invention. The fixing jig 1 for correction has: an upper plate 2; a side plate 5a (the first side plate), which is connected to the side S1 (the first side) of the upper plate 2; a side plate 5b (the second side plate), which is connected to the upper plate 2 The side S2 (second side) opposite to the side S1 is provided in a row; and the opening 3 is provided on the upper plate 2 for inserting the detector part of the surface electrometer as the calibration object.

[0021] The upper ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention can calibrate a surface electrometer conveniently in the past. As a result, the user has to entrust the surface electrometer to a third department for calibrating, therefore generating a problem of entrustment cost. The fixed clamp (1) for calibrating comprises: an upper board (2); a side board (5a, the first side board) connecting with the side (S1, the first side) of the upper board (2); a side board (5b, the second side board) connecting with the side (S2, the second side) of the upper board (2) which faces the side (S1); and an opening (3) disposed on the upper board (2) for inserting a sensor of the surface electrometer which is calibrated as an object.

Description

technical field [0001] The invention relates to a fixing jig for calibration of a surface electrometer and a calibration method. Background technique [0002] In recent years, there has been an increasing demand for static electricity management in the front-end process of semiconductor manufacturing. Therefore, semiconductor factories introduce a large number of surface electrometers and conduct static electricity management. A method of measuring static electricity is described in Patent Document 1, for example. This document describes that the electrostatic charge amount of the object to be measured is measured while keeping the distance between the object to be measured and a measuring probe constant. [0003] In addition, Non-Patent Document 1 describes the electrostatic measurement principle of a surface electrometer. This document describes a measurement method called a feedback method or a zero point method. In this method, a displacement current is induced in th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01R35/00G01R5/28G01R29/12G01R29/24
Inventor 牛岛三男
Owner RENESAS ELECTRONICS CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap