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Leadframe and method of manufacturing the same

a technology of lead frame and manufacturing method, which is applied in the field of lead frame, can solve problems such as raising the product cos

Inactive Publication Date: 2005-07-14
IITANI ICHINORI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0010] According to the present invention, much cheaper leadframes can be provided since the area to be plated with palladium can be minimized, in comparison with the conventional leadframe in which palladium plating is carried out to the whole area.
[0017] According to the methods described above, the leadframe which is not only cheaper but also does not cause such fault as missing of lead, breakage of resin etc., as seen in the conventional leadframe can be provided since it is good enough to cut only the resin portion at the time when the leadframe is cut into small chips by using the cutting or dicing device etc., after semiconductor elements are mounted on the predetermined position on the leadframe and sealing is made by resin because the metal portions to be cut has already dissolved by the etching.

Problems solved by technology

However, since palladium is an expensive metal material, there is a problem of raising the product cost by using palladium plating to the whole surface.

Method used

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  • Leadframe and method of manufacturing the same
  • Leadframe and method of manufacturing the same
  • Leadframe and method of manufacturing the same

Examples

Experimental program
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Effect test

embodiment 1

[0024]FIG. 1 is a flowchart illustrating an embodiment of the manufacturing method of leadframe according to the present invention. In the FIG. 1, 1 is a plate of copper or similar material for forming a leadframe. 2 is a dry film mounted on the front and back surface of the metal plate 1. 3 is a glass mask which is put on the dry film 2 placed on the surface of the metal plate 1, and which forms a leadframe pattern 3a by using a light shielding agent. 4 is a glass mask which is put on the dry film 2 placed on the back surface of the metal plate 1, and which forms a leadframe pattern 4a on symmetrically opposite side to the leadframe pattern 3a with respect to the metal plate 1 by using the light shielding agent. 5 and 6 are glass masks which form predetermined shading patterns, and 7 are a plurality of etching liquid injection nozzles which are disposed oppositely at both sides of the metal plate 1.

[0025] Next, the manufacturing process of the leadframe will be explained in turn. ...

embodiment 2

[0031]FIG. 2 shows a flowchart illustrating another embodiment of the manufacturing method of leadframe according to the present invention. In FIG. 2, the same reference numerals in FIG. 1 are used to the substantially same components and portions, the explanation of the reference numerals are omitted. Since each process shown in FIGS. 2A, 2B, 2C and 2D is the same as each process shown in FIGS. 1A, 1B, 1C and 1D as it is clearly seen by comparison with FIG. 1, the explanation of such process is omitted, with respect to each process shown after FIG. 2E, the explanation will be made.

[0032] As shown in FIG. 2E, the etching is carried out by spraying the etching liquid through the injection nozzles 7 to the both sides of the metal plate 1 with the plated layer la. Such etching is carried out until the metal of the portion where the plating is not carried out becomes extremely thin in consequence of such metal having been almost dissolved and removed.

[0033] After a tape 8 is attached,...

embodiment 3

[0034]FIG. 3 shows a flowchart illustrating still another embodiment of the manufacturing method of leadframe according to the present invention. In FIG. 3, the same reference numerals in FIG. 1 are used to the substantially same components and portions, the explanation of those numeral references is omitted. Since each process shown in FIGS. 3A and 3B is the same as the process shown in FIGS. 1A and 1B as it is clearly seen in comparison with FIG. 1, the explanation of such processes is omitted, with respect to each process shown after FIG. 3C, the explanation will be made.

[0035] As shown in FIG. 3C, the etching is carried out by spraying the etching liquid through the injection nozzles 7 on both sides of the metal plate 1 on which the dry film 2 remains corresponding to the leadframe pattern. Such etching is carried out until the metal plate 1 comes to have penetrated holes as a consequence of dissolution and removal of the metal of portions on which the dry film 2 do not exist, ...

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PUM

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Abstract

A leadframe is plated with palladium only to a surface of a metal plate on which semiconductors elements are to be mounted and a surface of the metal plate to be placed on a substrate, and is not plated with palladium to lead portions, pad portions, other portions except for the surfaces to be plated and the side surface, of the leadframe, thereby, the amount of use of palladium is reduced to minimum and a cheap leadframe can be provided.

Description

[0001] This is a division of application Ser. No. 10 / 482,962 filed Jan. 7, 2004, the content of which is incorporated herein by reference.TECHNICAL FIELD [0002] The present invention relates to a leadframe to be used for semiconductor devices and manufacturing method of the same. BACKGROUND ART [0003] Conventionally, a leadframe is manufactured in such way that a pattern of the leadframe is formed from a metal plate by etching or press processing, then, after palladium plating is carried out to the whole surface of it, semiconductor elements are mounted on the predetermined position, and then, after sealing with resin, cutting is carried out by using a die etc. Finally, separate chips are produced. Such products are in practical use as electronic parts as IC chips. [0004] In recent years, in a specification of the leadframe, the use of coating by solder plating containing lead has ceased in consideration of the influence on environment, and palladium plating to the whole surface of ...

Claims

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Application Information

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IPC IPC(8): H01L21/48H01L23/495
CPCH01L21/4821H01L2924/01028H01L23/49582H01L24/45H01L2224/45144H01L2224/48091H01L2224/48247H01L2224/85464H01L2924/01046H01L2924/01057H01L2924/01078H01L2924/01079H01L2924/14H01L2924/3025H05K3/3426H01L21/4828H01L24/48H01L2924/00014H01L2224/48664H01L2924/00H01L23/495
Inventor IITANI, ICHINORIHAMADA, YOUICHIROU
Owner IITANI ICHINORI