Tetrahedral amorphous carbon film and method of making same
a carbon film, tetrahedral technology, applied in the direction of maintaining the alignment of the head carrier, manufacturing head surface, instruments, etc., can solve the problems of water or lubricant inevitable attachment or adhesion, and the fluorine is attached or glued to the surface of the hard carbon film, so as to achieve sufficient repellent performance, increase hardness, and the effect of head slider
Inactive Publication Date: 2005-08-11
FUJITSU LTD
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Benefits of technology
The present invention provides a method for making a hard carbon film that can prevent attachment or adherence of water and lubricant agents, regardless of improved hardness. The method involves depositing carbon atoms over the surface of an object, keeping it exposed to fluorine atoms. The fluorine atoms scatter within the deposited carbon atoms, resulting in a compact structure with a sufficient amount of sp3 carbon bonds. The hardness of the film can be improved by increasing the content of sp3 carbon bonds. The film can be used in a head slider of a magnetic recording disk drive and provides a sufficient repellent performance to water. The bottom surface of the head slider is protected from damages or collisions.
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[0025]FIG. 1 schematically illustrates the interior structure of a hard disk drive (HDD) 11 as an example of a magnetic recording medium drive or storage device. The HDD 11 includes a box-shaped primary enclosure 12 defining an inner space of a flat parallelepiped, for example. At least one recording medium or magnetic recording disk 13 is accommodated in the inner space within the primary enclosure 12. The magnetic recording disk 13 is mounted on a driving shaft of a spindle motor 14. The spindle motor 14 is allowed to drive the magnetic recording disk 13 for rotation at a higher revolution rate such as 7,200 rpm or 10,000 rpm, for example. A cover, not shown, is coupled to the primary enclosure 12 so as to define the closed inner space between the primary enclosure 12 and itself.
[0026] A carriage 16 is also accommodated in the inner space of the primary enclosure 12 for swinging movement about a vertical support shaft 15. The carriage 16 includes a rigid swinging arm 17 extending...
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Abstract
A method of making a tetrahedral amorphous carbon (ta-C) film comprises depositing carbon atoms over the surface of an object. The surface of the object is kept exposed to fluorine atoms during the deposition of the carbon atoms. The method allows the fluorine atoms to scatter within the deposited carbon atoms in the tetrahedral amorphous carbon film. The hardness of the tetrahedral amorphous carbon film can be improved in response to an increased content of sp3 carbon bonds included within the tetrahedral amorphous carbon film. In addition, the tetrahedral amorphous carbon film still provides a sufficient repellent performance to water due to the fluorine atoms existing near the exposed surface of the tetrahedral amorphous carbon film.
Description
BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a hard carbon film overlaid on an object. In particular, the invention relates to a hard carbon protection film overlaid on the bottom surface of a slider body in a head slider. The head slider may be incorporated within a magnetic recording medium drive such as a hard disk drive, for example. [0003] 2. Description of the Prior Art [0004] In general, a head slider includes a hard carbon film formed to extend over the bottom surface of a slider body. Electronic cyclotron resonance chemical vapor deposition (ECR-CVD) or ion beam deposition (IBD) is usually utilized to form the hard carbon film. The hard carbon film covers over a head or transducer element exposed from the slider body. The hard carbon film serves to protect the head element from damages even when the head slider collides against a hard disk, representative of a magnetic recording medium, and / or contaminations scattered ...
Claims
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IPC IPC(8): C23C16/26C23C14/06C23C14/22G11B5/10G11B5/187G11B5/255G11B5/31G11B5/60
CPCC23C14/0605C23C14/221Y10T428/30G11B5/255G11B5/3106G11B5/10
Inventor HYODO, HIROYUKI
Owner FUJITSU LTD