Method of storing data using a micro-electromechanical system based data storage system
a data storage system and micro-electromechanical technology, applied in the field of micro-electromechanical systems based data storage systems, can solve the problems of increasing manufacturing costs, limited area a single mems device could write to, etc., and achieves the effect of scalability and high capacity in the amount of data stored and retrieved
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[0017]Micro-electromechanical systems (MEMS) based storage systems that utilize a MEMS cantilever device are desirable due to their ability to store data at a high level of density, exceeding 1 terabit / in2. An exemplary embodiment of such a system is shown in FIG. 1 and FIG. 2. The individual MEMS cantilever device 10 includes a pair of cantilever arms 12 that are supported by a structure 14. The arms 12 are connected by a heater 16 that is coupled to a probe tip 18. The arms 12 and heater 16 cooperate to form a current path during operation.
[0018]The probe tip 18 is arranged adjacent to a polymer layer 20 that is formed on a substrate 22. The polymer layer 20 and substrate 22 forms a stationary storage medium 26 that is used to store data in the storage system. During a write operation, the probe tip 18 is heated by passing current through the arms 12 and into the heater 16. The heat generated by heater 16 is conducted into the probe tip 18 to a temperature sufficient to form inden...
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