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Impedance-matching transformers for RF driven co2 gas discharge lasers

a technology of impedance matching transformer and laser, which is applied in the direction of multiple-port network, electrical equipment, laser details, etc., can solve the problem of inability to easily fine-tune the impedance matching circuit to compensa

Inactive Publication Date: 2011-11-24
COHERENT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0012]The present invention is directed to an electrical circuit for optimizing transfer of RF power between a source thereof having a source-frequency and a load. In one aspect, a circuit in accordance with the present invention comprises first and second transmission-line sections each thereof having first and second opposite ends. The first end of the first section is connected to the source. The second end of the first section is connected to the first end of the second section via a node therebet

Problems solved by technology

A particular disadvantage of all of the above-described prior-art impedance matching schemes is an inability to easily fine-adjust the impedance matching circuit to compensate for above discussed impedance matching variations between lasers of a particular model or family.

Method used

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  • Impedance-matching transformers for RF driven co2 gas discharge lasers
  • Impedance-matching transformers for RF driven co2 gas discharge lasers
  • Impedance-matching transformers for RF driven co2 gas discharge lasers

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Embodiment Construction

[0024]Referring now to the drawings, wherein like components are designated by like reference numerals, FIG. 2 schematically illustrates of one preferred embodiment 20 of a CO2 laser including one example 22A of a variable impedance matching transformer in accordance with the present invention.

[0025]A power amplifier 24 is the final amplification stage of an RF power supply (RFPS) including an RF oscillator (not shown) the output of which is amplified by a series of preamplifiers (also not shown) and then power amplifier 24. The output of the power amplifier, i.e., the output of the RFPS, is delivered to a CO2 laser head 26 via impedance matching transformer 22A. Laser head 26 includes an enclosure in which are located discharge electrodes and a lasing gas mixture (not shown) as is known in the art. Here it is assumed that power amplifier 24 has an impedance ZS equal to 50 Ohms, and that the laser head has an impedance ZL, which can have any value between 25 Ohms (ZMAX) and 12 Ohms ...

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Abstract

In a CO2 gas discharge laser energized by a radio frequency (RF) power source a transformer having selectively variable output impedance is used to match output impedance of the power source to the impedance of discharge electrodes of the laser. A similar transformer can be used to impose a selective variable phase-shift on the RF power from the source. The variable impedance transformer can also be used for impedance matching between amplifier stages in the power source.

Description

TECHNICAL FIELD OF THE INVENTION[0001]The present invention relates in general to impedance matching a radio frequency power supply (RFPS) to a load provided by discharge electrodes and related components in a radio frequency (RF) driven CO2 gas discharge laser. The invention relates in particular to impedance matching an RFPS to a load using fractional-wavelength transmission lines in series.DISCUSSION OF BACKGROUND ART[0002]It is well known the for optimum power transfer from a RFPS to a load an impedance-matching circuit is required. The output power of a CO2 gas discharge laser increases directly with increasing discharge volume. The RF input (load) impedance of the laser varies inversely as the output power and decreases directly as the area of the discharge. The load impedance can vary between lasers within the same model family due to variations in discharge gas pressure, spacing between the electrodes, and other factors[0003]An impedance matching circuit may comprise by one ...

Claims

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Application Information

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IPC IPC(8): H03H7/38
CPCH01S3/09702H03H7/383H03H7/185H01S3/2232
Inventor HAUER, FREDERICK W.TRACY, PATRICK T.
Owner COHERENT INC